数字横向剪切干涉仪相移技术
何煦, 向阳. 数字横向剪切干涉仪相移技术[J]. 光学 精密工程, 2013, 21(9): 2244.
HE Xu, XIANG Yang. Phase-shifting technology of digital lateral shearing interferometer[J]. Optics and Precision Engineering, 2013, 21(9): 2244.
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何煦, 向阳. 数字横向剪切干涉仪相移技术[J]. 光学 精密工程, 2013, 21(9): 2244. HE Xu, XIANG Yang. Phase-shifting technology of digital lateral shearing interferometer[J]. Optics and Precision Engineering, 2013, 21(9): 2244.