强激光与粒子束, 2007, 19 (8): 1381, 网络出版: 2008-02-18  

不锈钢管道低温溅射镀TiN薄膜技术

Technology of coating TiN film on inner face of stainless steel pipe by sputtering at low temperature
作者单位
中国科学技术大学,国家同步辐射实验室,合肥,230029
摘要
设计了一套适用于加速器细长管道真空室的低温溅射镀TiN薄膜装置.利用该装置,对86 mm×2 000 mm的不锈钢管道真空室进行溅射镀TiN膜实验,并对镀膜实验结果进行分析,得到了适用于加速器管道真空室内壁溅射镀TiN膜的表面处理参数.样品测试结果表明:在压强为80~90 Pa、基体温度为160~180 ℃的镀膜参数下,不锈钢管道内壁获得的TiN薄膜最佳,薄膜沉积速率为0.145 nm/s.镀膜后真空室的二次电子产额明显降低.
Abstract
参考文献

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张耀锋, 王勇, 尉伟, 王建平, 范乐, 蒋道满, 朱存宝, 刘祖平. 不锈钢管道低温溅射镀TiN薄膜技术[J]. 强激光与粒子束, 2007, 19(8): 1381. 张耀锋, 王勇, 尉伟, 王建平, 范乐, 蒋道满, 朱存宝, 刘祖平. Technology of coating TiN film on inner face of stainless steel pipe by sputtering at low temperature[J]. High Power Laser and Particle Beams, 2007, 19(8): 1381.

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