The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution
Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. 光学学报, 2003, 23(s1): 835.
Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. Acta Optica Sinica, 2003, 23(s1): 835.
[1] Zhang Zengyao, Luo jia xiang, The Capacitive Transducer for Displacement, China Metrology Publishing House, 2002
[2] Zhang Zengyao, The PLL Signal Processing System of Capacitive Transducer, Proceedings of China Symposium on Metrology and Measurement, the Acta Metrologica Sinica Press, 2002.12
Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. 光学学报, 2003, 23(s1): 835. Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. Acta Optica Sinica, 2003, 23(s1): 835.