光学学报, 2003, 23 (s1): 835, 网络出版: 2013-01-28
The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution
The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution
知识挖掘
本文相似领域研究进展，
知识服务
本文主要研究领域论文发表情况：
本文研究领域论文发表情况（统计图）：
Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. 光学学报, 2003, 23(s1): 835. Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. Acta Optica Sinica, 2003, 23(s1): 835.
PDF全文
