光学学报, 2003, 23 (s1): 835, 网络出版: 2013-01-28
The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution
The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution
补充材料
Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. 光学学报, 2003, 23(s1): 835. Zhang Zengyao, Wang Wei, Jin Ning. The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution[J]. Acta Optica Sinica, 2003, 23(s1): 835.
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