SOI压阻传感器的阳极键合结合面检测
陈立国, 王挺, 李亚娣, 潘明强. SOI压阻传感器的阳极键合结合面检测[J]. 光学 精密工程, 2016, 24(6): 1382.
CHEN Li-guo, WANG Ting, LI Ya-di, PAN Ming-qiang. Detection of anodic bonding joint surface for SOI piezoresistive sensor[J]. Optics and Precision Engineering, 2016, 24(6): 1382.
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陈立国, 王挺, 李亚娣, 潘明强. SOI压阻传感器的阳极键合结合面检测[J]. 光学 精密工程, 2016, 24(6): 1382. CHEN Li-guo, WANG Ting, LI Ya-di, PAN Ming-qiang. Detection of anodic bonding joint surface for SOI piezoresistive sensor[J]. Optics and Precision Engineering, 2016, 24(6): 1382.
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