Ge-Sb-S硫系玻璃的飞秒激光诱导损伤研究

李铜铜; 张鸣杰; 田康振; 张翔; 袁孝; 杨安平; 杨志勇

doi:doi:10.3788/AOS201939.1016001

光学学报, 2019, 39 (10): 1016001, 网络出版: 2019-10-09

Ge-Sb-S硫系玻璃的飞秒激光诱导损伤研究下载： 959次

Femtosecond Laser-Induced Damage on Ge-Sb-S Chalcogenide Glass

李铜铜 ¹张鸣杰 ¹田康振 ¹张翔 ^2,3袁孝 ^2,3杨安平 ¹杨志勇 ^1,2,3,*

作者单位

¹ 江苏师范大学物理与电子工程学院, 江苏省先进激光材料与器件重点实验室, 江苏徐州 221116

² 苏州大学光电科学与工程学院, 苏州纳米科技协同创新中心, 江苏苏州215006

³ 江苏省先进光学制造技术重点实验室和教育部现代光学技术重点实验室, 江苏苏州215006

图 & 表

图 1. 飞秒LDT测试实验装置示意图

Fig. 1. Experimental setup diagram of fs LDT test

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图 2. Ge-Sb-S 玻璃的LDT演变。(a) Ge_0.3Sb_0.1S_0.6玻璃的LDT与辐照脉冲重复频率的关系;(b) Ge_xSb_0.1S_0.9-_x玻璃的LDT与化学组成的关系;(c) Ge_0.15Sb_xS_0.85-_x玻璃的LDT与化学组成的关系

Fig. 2. Evolution of LDT of Ge-Sb-S glass. (a) Correlation between LDT of Ge_0.3Sb_0.1S_0.6 glass and repetition rate of irradiating pulse; (b) correlation between composition and LDT of Ge_xSb_0.1S_0.9-_x glass; (c) correlation between composition and LDT of Ge_0.15Sb_xS_0.85-_x glass

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图 3. 不同重复频率飞秒脉冲辐照下Ge_0.3Sb_0.1S_0.6玻璃表面损伤区域的SEM照片

Fig. 3. SEM images of damaged areas on Ge_0.3Sb_0.1S_0.6 glass irradiated by fs-pulses with different repetition rates

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表 1Ge-Sb-S玻璃在中心波长为1030 nm、脉冲宽度为216 fs、重复频率为1~1000 kHz激光辐照下的LDTs

Table1. LDTs of Ge-Sb-S glasses irradiated by laser with central wavelength of 1030 nm, pulse width of 216 fs, and repetition rate of 1-1000 kHz

Composition	${d_{S}}_{}$ /%	LDT /(GW·cm^-2)
Composition	${d_{S}}_{}$ /%	1000 kHz	100 kHz	10 kHz	1 kHz
Ge_0.15Sb_0.1S_0.75	30	21.5	82.6	429.4	2222.0
Ge_0.2Sb_0.1S_0.7	15	22.1	88.3	418.6	2400.6
Ge_0.25Sb_0.1S_0.65	0	31.6	140.8	505.4	2630.5
Ge_0.285Sb_0.1S_0.615	-10.5	10.7	71.8	418.4	1982.3
Ge_0.3Sb_0.1S_0.6	-15	9.9	65.9	370.8	1974.0
Ge_0.325Sb_0.1S_0.575	-22.5	9.7	54.0	284.7	1854.8
Ge_0.15Sb_0.15S_0.7	17.5	21.8	86.6	432.9	2374.1
Ge_0.15Sb_0.2S_0.65	5	22.6	100.0	435.5	2480.9
Ge_0.15Sb_0.22S_0.63	0	24.2	103.5	447.3	2531.3
Ge_0.15Sb_0.25S_0.6	-7.5	11.4	72.2	424.5	2114.3
Ge_0.15Sb_0.28S_0.57	-15	9.8	57.4	290.8	1931.9

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表 2不同重复频率飞秒脉冲辐照下Ge_0.3Sb_0.1S_0.6玻璃表面损伤区域的化学组成

Table2. Composition of damaged area on Ge_0.3Sb_0.1S_0.6 glass surface exposed to fs-pulses with different repetition rates

Repetition rate /kHz	Position	Molar fraction /%
Repetition rate /kHz	Position	Ge	Sb	S	O
1	Damaged	30.2	10.1	55.4	4.3
1	Undamaged	30.2	10.3	59.5	0
10	Damaged	31.0	9.9	52.9	6.2
10	Undamaged	30.4	10.3	59.3	0
100	Damaged	31.6	8.9	51.8	7.7
100	Undamaged	30.2	10.2	59.4	0
1000	Damaged	32.1	8.1	48.7	11.1
1000	Undamaged	30.2	10.1	59.7	0

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李铜铜, 张鸣杰, 田康振, 张翔, 袁孝, 杨安平, 杨志勇. Ge-Sb-S硫系玻璃的飞秒激光诱导损伤研究[J]. 光学学报, 2019, 39(10): 1016001. Tongtong Li, Mingjie Zhang, Kangzhen Tian, Xiang Zhang, Xiao Yuan, Anping Yang, Zhiyong Yang. Femtosecond Laser-Induced Damage on Ge-Sb-S Chalcogenide Glass[J]. Acta Optica Sinica, 2019, 39(10): 1016001.

Ge-Sb-S硫系玻璃的飞秒激光诱导损伤研究下载： 959次

图 1. 飞秒LDT测试实验装置示意图

Fig. 1. Experimental setup diagram of fs LDT test

图 2. Ge-Sb-S 玻璃的LDT演变。(a) Ge_0.3Sb_0.1S_0.6玻璃的LDT与辐照脉冲重复频率的关系;(b) Ge_xSb_0.1S_0.9-_x玻璃的LDT与化学组成的关系;(c) Ge_0.15Sb_xS_0.85-_x玻璃的LDT与化学组成的关系

Fig. 2. Evolution of LDT of Ge-Sb-S glass. (a) Correlation between LDT of Ge_0.3Sb_0.1S_0.6 glass and repetition rate of irradiating pulse; (b) correlation between composition and LDT of Ge_xSb_0.1S_0.9-_x glass; (c) correlation between composition and LDT of Ge_0.15Sb_xS_0.85-_x glass

图 3. 不同重复频率飞秒脉冲辐照下Ge_0.3Sb_0.1S_0.6玻璃表面损伤区域的SEM照片

Fig. 3. SEM images of damaged areas on Ge_0.3Sb_0.1S_0.6 glass irradiated by fs-pulses with different repetition rates

表 1Ge-Sb-S玻璃在中心波长为1030 nm、脉冲宽度为216 fs、重复频率为1~1000 kHz激光辐照下的LDTs

Table1. LDTs of Ge-Sb-S glasses irradiated by laser with central wavelength of 1030 nm, pulse width of 216 fs, and repetition rate of 1-1000 kHz

表 2不同重复频率飞秒脉冲辐照下Ge_0.3Sb_0.1S_0.6玻璃表面损伤区域的化学组成

Table2. Composition of damaged area on Ge_0.3Sb_0.1S_0.6 glass surface exposed to fs-pulses with different repetition rates

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图 1. 飞秒LDT测试实验装置示意图

Fig. 1. Experimental setup diagram of fs LDT test

图 2. Ge-Sb-S 玻璃的LDT演变。(a) Ge0.3Sb0.1S0.6玻璃的LDT与辐照脉冲重复频率的关系;(b) GexSb0.1S0.9-x玻璃的LDT与化学组成的关系;(c) Ge0.15SbxS0.85-x玻璃的LDT与化学组成的关系

Fig. 2. Evolution of LDT of Ge-Sb-S glass. (a) Correlation between LDT of Ge0.3Sb0.1S0.6 glass and repetition rate of irradiating pulse; (b) correlation between composition and LDT of GexSb0.1S0.9-x glass; (c) correlation between composition and LDT of Ge0.15SbxS0.85-x glass

图 3. 不同重复频率飞秒脉冲辐照下Ge0.3Sb0.1S0.6玻璃表面损伤区域的SEM照片

Fig. 3. SEM images of damaged areas on Ge0.3Sb0.1S0.6 glass irradiated by fs-pulses with different repetition rates

表 1Ge-Sb-S玻璃在中心波长为1030 nm、脉冲宽度为216 fs、重复频率为1~1000 kHz激光辐照下的LDTs

Table1. LDTs of Ge-Sb-S glasses irradiated by laser with central wavelength of 1030 nm, pulse width of 216 fs, and repetition rate of 1-1000 kHz

表 2不同重复频率飞秒脉冲辐照下Ge0.3Sb0.1S0.6玻璃表面损伤区域的化学组成

Table2. Composition of damaged area on Ge0.3Sb0.1S0.6 glass surface exposed to fs-pulses with different repetition rates

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Ge-Sb-S硫系玻璃的飞秒激光诱导损伤研究下载： 959次

图 2. Ge-Sb-S 玻璃的LDT演变。(a) Ge_0.3Sb_0.1S_0.6玻璃的LDT与辐照脉冲重复频率的关系;(b) Ge_xSb_0.1S_0.9-_x玻璃的LDT与化学组成的关系;(c) Ge_0.15Sb_xS_0.85-_x玻璃的LDT与化学组成的关系

Fig. 2. Evolution of LDT of Ge-Sb-S glass. (a) Correlation between LDT of Ge_0.3Sb_0.1S_0.6 glass and repetition rate of irradiating pulse; (b) correlation between composition and LDT of Ge_xSb_0.1S_0.9-_x glass; (c) correlation between composition and LDT of Ge_0.15Sb_xS_0.85-_x glass

图 3. 不同重复频率飞秒脉冲辐照下Ge_0.3Sb_0.1S_0.6玻璃表面损伤区域的SEM照片

Fig. 3. SEM images of damaged areas on Ge_0.3Sb_0.1S_0.6 glass irradiated by fs-pulses with different repetition rates

表 2不同重复频率飞秒脉冲辐照下Ge_0.3Sb_0.1S_0.6玻璃表面损伤区域的化学组成

Table2. Composition of damaged area on Ge_0.3Sb_0.1S_0.6 glass surface exposed to fs-pulses with different repetition rates