本文分析了紫外准分子激光对有机材料的消融过程,用理论模型解释了每个激光脉冲对有机材料的消融量与入射激光能量密度之间的关系.对于有机玻璃.当入射激光能量密度较高时,双光子过程将起主要作用.最后讨论了消融率随有机材料吸收系数之间的关系,对吸收系数较小的材料,消融率随吸收系数改变有一个极大值.

In this paper, we analysed the ablative process by which an UV exoimer laser can remove organic material. The etch depth per laser pulse as a function of incident energy density were explained by theoretical model. For polymethyl methacrylate, two photon processes play an important role at high incident energy density. The relationship between etoh depth per pulse and absorption coefficient of the organic material were also discussed. There is a maximum of etoh depth per pulse for a special absorption coefficient.