光电子快报（英文版）, 2017, 13 (4): 295, Published Online: Sep. 13, 2018
Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering
Basic Information
| DOI: | 10.1007/s11801-017-7065-y |
| 中图分类号: | -- |
| 栏目: | |
| 项目基金: | This work has been supported by the National Natural Science Foundation of China (Nos.61274113, 61404091, 61505144, 51502203 and 51502204), the Opening Fund of Key Laboratory of Silicon Device Technology in Chinese Academy of Sciences, and the Tianjin Natural Science Foundation (Nos.14JCZDJC31500 and 14JCQNJC00800). |
| 收稿日期: | Mar. 21, 2017 |
| 修改稿日期: | -- |
| 网络出版日期: | Sep. 13, 2018 |
| 通讯作者: | MI Wei (miwei1986@yeah.net) |
| 备注: | -- |
SUN Jian-xu, MI Wei, ZHANG De-shuang, YANG Zheng-chun, ZHANG Kai-liang, HAN Ye-mei, YUAN Yu-jie, ZHAO Jin-shi, LI Bo. Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering[J]. 光电子快报（英文版）, 2017, 13(4): 295.
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