光电子快报(英文版), 2017, 13 (4): 295, Published Online: Sep. 13, 2018  

Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering

Author Affiliations
1 Tianjin Key Laboratory of Film Electronic & Communication Devices, School of Electronics Information Engineering,Tianjin University of Technology, Tianjin 300384, China
2 Research and Development Center of Silicon Devices and Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029, China
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SUN Jian-xu, MI Wei, ZHANG De-shuang, YANG Zheng-chun, ZHANG Kai-liang, HAN Ye-mei, YUAN Yu-jie, ZHAO Jin-shi, LI Bo. Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering[J]. 光电子快报(英文版), 2017, 13(4): 295.

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SUN Jian-xu, MI Wei, ZHANG De-shuang, YANG Zheng-chun, ZHANG Kai-liang, HAN Ye-mei, YUAN Yu-jie, ZHAO Jin-shi, LI Bo. Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering[J]. 光电子快报(英文版), 2017, 13(4): 295.

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