光学 精密工程, 2009, 17 (1): 158, 网络出版: 2009-10-09   

高精度大口径光栅拼接装置的控制算法

Design method of controlling device for tiling high pecision and large aperture grating
作者单位
哈尔滨工业大学 机电学院,黑龙江 哈尔滨 150001
引用该论文

邵忠喜, 张庆春, 白清顺, 富宏亚. 高精度大口径光栅拼接装置的控制算法[J]. 光学 精密工程, 2009, 17(1): 158.

SHAO Zhong-xi, ZHANG Qing-chun, BAI Qing-shun, FU Hong-ya. Design method of controlling device for tiling high pecision and large aperture grating[J]. Optics and Precision Engineering, 2009, 17(1): 158.

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邵忠喜, 张庆春, 白清顺, 富宏亚. 高精度大口径光栅拼接装置的控制算法[J]. 光学 精密工程, 2009, 17(1): 158. SHAO Zhong-xi, ZHANG Qing-chun, BAI Qing-shun, FU Hong-ya. Design method of controlling device for tiling high pecision and large aperture grating[J]. Optics and Precision Engineering, 2009, 17(1): 158.

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