高精度大口径光栅拼接装置的控制算法

邵忠喜; 张庆春; 白清顺; 富宏亚

光学精密工程, 2009, 17 (1): 158, 网络出版: 2009-10-09

高精度大口径光栅拼接装置的控制算法

Design method of controlling device for tiling high pecision and large aperture grating

论文大纲

邵忠喜 ^*张庆春白清顺富宏亚

作者单位

哈尔滨工业大学机电学院,黑龙江哈尔滨 150001

光栅拼接运动学逆解并联机构自由度分析 grating tiling inverse dynamics parallel mechanism Degree of Freedom(DOF) analysis

摘要

采用宏/微结合双驱动的少自由度并联进给结构,给出了一种光栅拼接装置设计算法。宏动部分是5PTS-1PPS型并联机构,采用步进电机驱动滚珠丝杠形式的进给机构;微动部分是5TSP-1PPS型并联机构,采用压电陶瓷驱动柔性铰链形式的进给机构;二者串联构成光栅拼接机构。计算了宏动部分和微动部分的并联机构自由度,利用并联机构运动学的逆解推导出该装置的控制算法,并根据控制算法进行了宏动、微动机构点位控制的运动学仿真。为了提高机构的定位精度,分析了机构的系统误差并提出了误差修正方法。最后,将以上算法应用到光栅拼接装置中。实验结果表明:宏动部分最大移动定位误差为3.6 μm,最大转动定位误差为4.4 μrad;微动部分最大移动定位误差为0.06 μm,最大转动定位误差为1.2 μrad;基本满足光栅拼接系统的精度要求。

Abstract

A mechanical grating tiling device is designed by a macro-micro dual-drive parallel mechanism with a few Degrees of Freedom(DOF). The raster matching device is composed of a macro-moving part using a step-motor controlled ballscrew unit(a 5PTS-1PPS parallel mechanism)and a micro-moving part using a piezoelectric ceramics controlled flexure hinge(a 5TSP-1PPS parallel mechanism) in series. The DOFs for the macro-moving part and the micro-moving part have been calculated and the control algorithms are deduced through inversing dynamics of parallel mechanism. Then, the point-point controls of the macro-moving part and the micro-moving part are simulated subsequently. In order to improve positioning precision of this mechanism, system errors have been analyzed and modified. Finally, above control algorithms are applied to the grating tiling device and experimental results indicate that the maximum linear location error is 3.6 μm and the maximum rotation error is 4.4 μrad for the macro-moving part; the 0.06 μm and 1.2 μrad for the micro-moving part,obtained data can meet the precision requirement of grating tiling system.

参考文献

[1] 赵博, 郝德阜. 用拼接法获取大面积衍射光栅[J]. 光学精密工程,2000,8(5):503-507.

ZHAO B, HAO D F. Manufacturing large-size grating by mosaic way[J]. Opt. Precision Eng., 2000,8(5):503-507. (in Chinese)

[2] 杨学东,夏兰,马伟新.光栅拼接旋转偏差实时监测调节实验[J].中国激光,2007,34(9):1222-1226.

YANG X D, XIA L, MA W X. Experiment of real-time monitoring and adjusting of rotation error about tiled gratings[J]. Chinese Journal of Lasers, 2007,34(9):1222-1226. (in Chinese)

[3] ZHANG T J,YONEMURA M,KATO Y. An array-grating compressor for high-power chirped-pulse amplification lasers[J]. Optics Communications, 1998,145(1-6): 367-376.

[4] 张曙, HEISEL U. 并联运动机床[M]. 北京:机械工业出版社,2003:35-56.

ZHANG SH, HEISEL U. Parallel kinematics machine tool[M]. Beijing: China Machine Press, 2003:35-56. (in Chinese)

[5] 黄昔光, 廖启征, 李端玲. 基于四元数的台体型5SPS-1CCS并联机器人位置正解分析[J]. 机械工程学报,2007,43(5):8-13.

HUANG X G, LIAO Q Z, LI D L. Forward displacement analysis of generalized 5SPS-1CCS parallel robot mechanism based on quaternion[J]. Chinese Journal of Mechanical Engineering, 2007,43(5):8-13. (in Chinese)

[6] WEN F, LIANG C G. Displacement analysis of the 6-6 Stewart platform mechanism[J]. Mechanism and Machine Theory, 1994,29(4):547-557.

[7] GAO X S, LEI D L, LIAO Q Z. Generalized stewart-Gough platforms and their direct kinematics[J]. IEEE Trans. Robotics, 2005,21(2): 141-151.

[8] RAGHAVAN M. The stewart platform of general geometry has 40 configurations[J]. ASME J. Mech. Des., 1993,115(1): 227-282.

[9] 蔡自兴. 机器人学[M]. 北京:清华大学出版社,2000:46-53.

CAI Z X. Robotics[M]. Beijing: Tsinghua University Press, 2000: 46-53. (in Chinese)

[10] 节德刚, 刘延杰, 孙立宁. 一种宏微双重驱动精密定位机构的建模与控制[J]. 光学精密工程,2005,13(2):171-178.

JIE D G, LIU Y J, SUN L N. Modeling and control of a macor-micro dual-drive ultra-precision positioning mechanism[J]. Opt. Precision Eng., 2005,13(2): 171-178. (in Chinese)

[11] 栗洋, 周晓光, 甘东明. 新型6-CCS并联机器人机构的结构分析及运动学仿真[J]. 新技术新工艺,2006(12): 33-35.

LI Y, ZHOU X G, GAN D M. Configurable analysis and kinematics simulation of the new 6-CCS parallel mechanism[J]. New Technology & New Process, 2006(12): 33-35. (in Chinese)

[12] 张秀峰, 孙立宁. 精密并联机器人控制算法及控制系统研究[J]. 机械工程学报, 2004,40(4):177-180.

ZHANG X F, SUN L N. Research of precise parallels robot control method and system[J]. Chinese Journal of Mechanical Engineering,2004,40(4):177-180. (in Chinese)

[13] 高亮, 阚珊珊, 李敏. 压电陶瓷精密转动平台的转角精度测量[J]. 光学精密工程,2007,15(2):206-211.

GAO L, KAN S S, LI M. Rotation-angle-accuracy measurement of piezo tilt platform[J]. Opt. Precision Eng., 2007,15(2):206-211. (in Chinese)

[14] 张强, 卢泽生. 宏/微结合双驱动进给控制系统的建模与仿真研究[J]. 机械传动,2006,30(4):16-19.

ZHANG Q, LU Z SH. Modeling and simulation of macro/micro feed drive control system[J]. Journal of Mechanical Transmission, 2006,30(4):16-19. (in Chinese)

邵忠喜, 张庆春, 白清顺, 富宏亚. 高精度大口径光栅拼接装置的控制算法[J]. 光学精密工程, 2009, 17(1): 158. SHAO Zhong-xi, ZHANG Qing-chun, BAI Qing-shun, FU Hong-ya. Design method of controlling device for tiling high pecision and large aperture grating[J]. Optics and Precision Engineering, 2009, 17(1): 158.

高精度大口径光栅拼接装置的控制算法

关于本站 Cookie 的使用提示

全站搜索

高精度大口径光栅拼接装置的控制算法

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索