中国激光, 2017, 44 (1): 0102001, 网络出版: 2017-01-10
单光束飞秒激光诱导玻璃内部纳米光栅机理及应用研究进展 
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Research Progresson Single Femtosecond Laser Induced Nanogratings in Glass: Fundamentals and Applications
图 & 表
图 1. 飞秒激光辐照区域抛光裸露后的(a)(b)SEM二次电子图像和(c)(d)背散射电子图像[11]
Fig. 1. (a)(c) Secondary electron images and (b)(d) backscattering electron images of silica glass surface polished close to the depth of focal spot[11]
图 2. 纳米光栅结构。(a)沿入射光方向的SEM照片[20];(b)空间结构示意图[23]
Fig. 2. Nanograting structure. (a) SEM image along the incident light direction[20]; (b) schematic diagram of the spatial structure[23]
图 3. 纳米光栅的最小周期与入射光波长的关系曲线[26]
Fig. 3. Relationship between minimal period of nanogratings and incident laser wavelength[26]
图 4. 激光重复频率对石英玻璃内部材料改性的影响[33]
Fig. 4. Influence of laser repetition rate on material modification within fused silica[33]
图 5. 入射脉冲数对纳米光栅生长过程的影响[33]
Fig. 5. Influence of incident pulse number on nanograting growth[33]
图 6. 不同偏振飞秒激光在石英玻璃中扫描形成的线结构分析。(a)光学显微照片; (b)偏光显微镜照片;(c)偏光显微镜下对应线条的透射光强;(d)线的横截面光学照片[38]
Fig. 6. Analysis of lines imprinted in fused silica by laser pulses with different polarizations. (a) Optical microscope photograph; (b) polarizing microscope photograph; (c) transmitted light intensity corresponding to lines under polarizing microscope; (d) cross-sectional photograph of lines[38]
图 7. 不同玻璃中纳米光栅对633 nm光产生的光程延迟值随脉宽的变化[41]
Fig. 7. Variance of optical path retardation with pulse duration for nanogratings in different glass versus light with wavelength of 633 nm[41]
图 8. 长条形的纳米孔阵列随着入射激光强度的降低逐渐演变为单个纳米孔[44]
Fig. 8. Evolution from nanopore array to single nanopore with the laser intensity decreasing[44]
图 9. 脉冲能量为(a) 0.2 μJ和(b) 0.4 μJ时GeO2玻璃中辐照区域剖开后的二次电子图像;(c) GeO2玻璃中的纳米光栅结构示意图[49]
Fig. 9. Secondary electron images of cleaved sample surfaces in the modified regions in GeO2 glass created by femtosecond laser pulse with a pulse energy of (a) 0.2 μJ and (b) 0.4 μJ; (c) schematic diagram of nanograting structure in GeO2 glass[49]
图 10. 飞秒激光诱导区域的(a) TEM照片和(b)高分辨率SEM照片及衍射花样;(c)纳米结构示意图[50]
Fig. 10. (a) TEM image and (b) high resolution SEM image and diffraction pattern of femtosecond laser-induced nanostructures; (c) schematic diagram of nanostructures[50]
图 11. (a)玻璃AF 32中形成的纳米光栅SEM图;当激光扫描速度为3 μm/s、重复频率为100 kHz时,(b)石英玻璃、(c)AF 32玻璃和(d)Borofloat 33玻璃中光程延迟值与脉冲能量和脉宽之间的关系[52]
Fig. 11. (a) SEM image of nanograting formed in AF 32 glass surface; distributions of light retardation values in (b) silica glass, (c) AF 32 glass, and (d) Borofloat 33 glass versus pulse energy and duration under the conditions of 3 μm/s laser scanning speed and 100 kHz pulse repetition rate[52]
图 12. (a)纳米等离子体进化成纳米平面的过程[27];(b)纳米等离子体周围的局域场增强示意图[19]
Fig. 12. (a) Evolution of nano-plasma into nano-plane[27]; (b) schematic diagram of local field enhancement around a nano-plasma[19]
图 13. 自陷激子形成和弛豫成半永久性点缺陷的示意图[26]
Fig. 13. Schematic diagram of forming self-trapped excitons and decaying to semi-permanent point defects[26]
图 14. 用PFT飞秒激光实现纳米光栅三维旋转的示意图[56]
Fig. 14. Schematic diagram of realizing three-dimensional rotation of nanogratings by PFT femtosecond pulses[56]
图 15. (a)多孔玻璃中激光修饰与未修饰区域界面表面等离子体波的激发概念图;(b)表面等离子体波的周期计算值与电子密度之间的关系[58]
Fig. 15. (a) Concept map of exciting surface plasma wave at interface between laser modified and unmodified areas of porous glass; (b) relationship between calculated period of surface plasma wave and electron density[58]
图 16. 激光偏振方向平行(上)和垂直于扫描方向(下)两种情况下的(a)抛光和腐蚀后的SEM照片和(b)纳米光栅形成过程的示意图[61]
Fig. 16. (a) SEM image of nanograting after polishing and etching and (b) schematic diagram of nanograting forming process for parallel scanning (upper) or perpendicular scanning (lower)[61]
图 17. 纳米流体装置的(a)结构示意图和(b)光学照片;纳米通道阵列宽度为(c) 50 nm和(d) 200 nm的荧光照片[45]
Fig. 17. (a) Schematic diagram and (b) photograph of nanofluidic device; fluorescent images of nanochannel arrays with width of (c) 50 nm and (d) 200 nm, respectively[45]
图 18. 五维光存储技术的读取过程。(a)对记录在分离的三层点阵的数据进行双折射测量;(b)放大的5×5点阵的光轴取向;(c)顶层数据的光程延迟值分布;(d)顶层数据的光轴取向分布;(e)放大的归一化光程延迟值矩阵;(f)放大的归一化光轴矩阵;(g)从(e)中读取的二进制数据;(h)从(f)中读取的二进制数据[65]
Fig. 18. Readout process in 5D optical storage. (a) Birefringence measurement of the data record in three separate layers; (b) enlarged 5×5 dot array; (c) retardance distribution retrieved from the top data layer; (d) slow axis distribution retrieved from the top data layer; (e) enlarged normalized retardance matrix; (f) enlarged normalized slow axis matrix; (g) binary data retrieved from (e); (h) binary data retrieved from (f)[65]
图 19. (a)偏振衍射光栅的光轴取向分布图;(b)虚线位置量化的光栅慢轴取向及其对不同偏振入射光的相位调制;(c)光通过偏振衍射光栅后的相位分布图;(d)不同偏振入射光通过光栅后的远场衍射光强和偏振分布;(e)偏振衍射光栅对径向偏振和角偏振的光漩涡的分解[73-74]
Fig. 19. (a) Distribution along optical axial direction of polarization diffraction grating; (b) slow axis orientation and corresponding phase modulation for two circular polarizations across the dashed line in (a); (c) phase distribution for light passing through polarization diffraction grating; (d) far-field intensity and polarization distributions for differently polarized light passing through gratings; (e) radially or azimuthally polarized optical vortexes splitted by polarization diffraction grati
图 20. (a)四分之一波片偏振转换器和(b)二分之一波片偏振转换器中纳米光栅的分布示意图;用于(c)圆偏振和(d)线偏振入射光的径向偏振转换器的纳米光栅取向分布图[74]
Fig. 20. Schematic diagram of nanograting distribution in (a) quarter- and (b) half-wave polarization converters; femtosecond-laser-written radial polarization converters for (c) circular and (d) linear incident polarizations[74]
王珏晨, 张芳腾, 邱建荣. 单光束飞秒激光诱导玻璃内部纳米光栅机理及应用研究进展[J]. 中国激光, 2017, 44(1): 0102001. Wang Juechen, Zhang Fangteng, Qiu Jianrong. Research Progresson Single Femtosecond Laser Induced Nanogratings in Glass: Fundamentals and Applications[J]. Chinese Journal of Lasers, 2017, 44(1): 0102001.
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