红外与毫米波学报, 2018, 37 (6): 679, 网络出版: 2018-12-26
InAs/AlSb 异质结的Pd/Ti/Pt/Au 合金化欧姆接触
Pd/Ti/Pt/Au alloyed ohmic contact for InAs/AlSb heterostructures with the undoped InAs cap layer
基本信息
DOI: | 10.11972/j.issn.1001-9014.2018.06.007 |
中图分类号: | TN304.2, TN305 |
栏目: | |
项目基金: | Supported by Advanced Research Foundation of China (914xxx803-051xxx111), National Defense Advanced Research project (315xxxxx301), and National Defense Innovation Program (48xx4) |
收稿日期: | 2018-01-19 |
修改稿日期: | 2018-04-11 |
网络出版日期: | 2018-12-26 |
通讯作者: | 吕红亮 (hllv@mail.xidian.edu.cn) |
备注: | -- |
张静, 吕红亮, 倪海桥, 牛智川, 张义门, 张玉明. InAs/AlSb 异质结的Pd/Ti/Pt/Au 合金化欧姆接触[J]. 红外与毫米波学报, 2018, 37(6): 679. ZHANG Jing, LYU Hong-Liang, NI Hai-Qiao, NIU Zhi-Chuan, ZHANG Yi-Men, ZHANG Yu-Ming. Pd/Ti/Pt/Au alloyed ohmic contact for InAs/AlSb heterostructures with the undoped InAs cap layer[J]. Journal of Infrared and Millimeter Waves, 2018, 37(6): 679.