设计了一种基于石英增强光声光谱技术的痕量气体传感器,用来检测非纯氢气中的痕量甲烷浓度。传感器 被配置了一个微型谐振腔,能够在空间上对声波进行限制,用以增强信号幅值。在这种配置和27 kPa的 最优气压下,获得的甲烷探测灵敏度为3.2 ppm(1 s平均时间),相应的归一化噪声等效吸收 系数(1 σ)为2.45×10-8cm-1 W/Hz1/2。

A compact gas sensor based on quartz-enhanced photoacoustic spectroscopy (QEPAS) was developed for trace methane quantification in impure hydrogen. The sensor is equipped with a microresonator to confine the sound wave and enhance QEPAS signal. The normalized noise-equivalent absorption coefficients (1 σ) of 2.45×10-8cm-1 W/Hz1/2 for CH4 detection at 27 kPa were demonstrated with the QEPAS sensor configuration, which corresponds to the detection sensitivity of 3.2 ppm (1 s averaging time).