光学学报, 2008, 28 (11): 2232, 网络出版: 2008-11-17   

氮气交流放电光谱强度和电压及气压的关系

Emission Spectral Intensity Variation with Discharge Voltage and Pressure in AC Discharge of N2
作者单位
华东师范大学物理系精密光谱科学与技术国家重点实验室, 上海 200062
摘要
利用浓度调制光谱技术, 测量了玻璃管中放电频率20 kHz时N2的介质阻挡放电光谱。实验记录了N2的C3∏u-B3∏g 357. 7nm和N+2的B2∑+u-X2∑+g 391.4 nm的跃迁谱线光谱强度随不同电压和气体压强变化规律。实验数据显示, 保持气体压强p=130 Pa不变, 在电压较低时, 光谱强度随电压增长较快, 在电压较高时, 光谱强度增长较慢; 保持放电电压U=6.4 kV不变, 光谱强度随气压增长逐渐变小。根据电子和分子碰撞激发函数和电离函数, 建立光强随放电参数变化的物理理论模型和公式, 并对实验数据进行数学拟合, 拟合曲线与实验结果符合较好, 相关系数R>0.9。进一步明确了等离子体发射光谱强度随不同电压和气体压强变化的机理。
Abstract
N2 spectral in glass capillary by dielectrical barrier discharge at discharge frequency of 20 kHz are measured via concentration modulation spectroscopy. The spectral lines at 357.7 nm of N2 C3∏u-B3∏g and at 391.4 nm N+2 B2∑+u-X2∑+g are recorded to study the effect of discharge voltage and gas pressure. The measurement results show that the intensity increases rapidly with discharge voltage at a lower voltage range, but the speed slows at the higher voltage range, for constant gas pressure of 130 Pa; and the intensity increases backwardly with gas pressure at constant discharge voltage of 6.4 kV. Furthermore, a theoretical model is proposed according to electronic excitation function and ionization function, which can basically interpret the relation between spectral intensity and discharge parameters, fit the experimental data well, and the correlation coefficient is over 0.9. The mechanism of the dependence of the emission spectral intensity on discharge voltage and gas pressure in the plasma discharge was revealed further.
参考文献

[1] 董丽芳, 冉俊霞, 尹增谦 等. 大气压氩气介质阻挡放电中的电子激发温度[J]. 光谱学与光谱分析, 2005, 25(8): 1184~1186

    Dong Lifang, Ran Junxia, Yin Zengqian et al.. Electron excitation temperature of argon dielectric barrier discharge at atmospheric pressure[J]. Spectroscopy and Spectral Analysis, 2005, 25(8): 1184~1186

[2] . 等电位辉光放电电子温度的光谱测量与计算[J]. 核聚变与等离子体物理, 2005, 25(4): 300-305.

    . . Spectrum measurement and calculation of electron temperature in glow discharge with equivalent electric potential[J]. Nuclear Fusion and Plasma Physics, 2005, 25(4): 300-305.

[3] 胡文波, 王建琪, 曹艳 等. 交流等离子体显示器的红外辐射光谱[J]. 光学学报, 2007, 27(7): 1285~1289

    Hu Wenbo, Wang Jianqi, Cao Yan et al.. Infrared radiation spectrum of alternating current plasma display panels[J]. Acta Optica Sinica, 2007, 27(7): 1285~1289

[4] 柯常军, 谭荣清, 郑义军 等. 100 J 侧面滑闪预电离TE CO2 激光器[J]. 中国激光, 2006, 33(8): 1009~1012

    Ke Changjun, Tan Rongqing, Zheng Yijun et al.. 100 J TE CO2 Laser with side-sliding discharge preionization[J]. Chin. J. Lasers, 2006, 33(8): 1009~1012

[5] 王云飞, 吴谨, 刘世明 等. 基于Pulser/Sustainer技术的可调谐长脉冲TE CO2激光器[J]. 中国激光, 2007, 34(9): 1185~1189

    Wang Yunfei, Wu Jin, Liu Shiming et al.. Tunable long pulse TE CO2 laser with pulser/sustainer excitation[J]. Chin. J. Lasers, 2007, 34(9): 1185~1189

[6] 王霞敏, 杨赛丹, 陈扬骎 等. CH分子束的强度与CH4/He混合配比的关系及CH(A~2Δ)振转温度的计算[J]. 光学学报, 2006, 26(12): 1866~1870

    Wang Xiamin, Yang Saidan, Chen Yangqin et al.. Dependence of CH molecular beam intensity on ratio of CH4 buffering in helium and vibration and rotation temperatures calculation of CH(A~2Δ)[J]. Acta Optica Sinica, 2006, 26(12): 1866~1870

[7] . Stoffels, A. J. Flikweert, W. W. Stoffels. Plasma needle: a non-destructive atmospheric plasma source for fine surface treatment of (bio)materials[J]. Plasma Sources Sci. Technol., 2002, 11(2): 383-388.

[8] . 氮氧混合气体高压脉冲电晕放电等离子体的分子束质谱诊断研究[J]. 真空科学与技术, 2002, 22(2): 131-134.

    . . Diagnosis of high voltage pulsed corona discharge induced N2+O2 plasma by molecular beam mass spectrometry[J]. J. Vacuum Science and Technology, 2002, 22(2): 131-134.

[9] Wenchun Wang, Jialiang Zhang, Feng Liu et al.. Study on density distribution of high-energy electrons in pulsed corona discharge[J]. Vacuum, 2004, 73(3~4): 333~339

[10] . K. Ghosh. Dissociation of nitrogen in flowing DC glow plasmas[J]. J. Phys. D, 1993, 26(9): 1419-1426.

[11] . Christova, V. Gagov, I. Koleva. Analysis of the profiles of the ArI 696.5 nm spectral line excited in nonstationary discharges[J]. Spectrochimica Acta Part B, 2000, 55(7): 815-822.

[12] K. T. Rie, E. Menthe, J. Whle. Optimization and control of a plasma carburizing process by means of optical emission spectroscopy[J]. Surface and Coatings Technology, 1998, 98(1~3): 1192~1198

[13] 孙殿平,朱轶,杨晓华 等. 离子分子束源的浓度调制光谱研究[J]. 光谱学与光谱分析, 2006, 26(9): 1594~1597

    Sun Dianping, Zhu Yi, Yang Xiaohua et al.. Study on concentration modulation spectra of the molecular ion beam by AC glow discharge[J]. Spectroscopy and Spectral Analysis, 2006, 26(9): 1594~1597

[14] . Saykally. Velocity modulation infrared laser spectroscopy of molecular ions[J]. Ann. Rev. Phys. Chem., 1984, 35(10): 387-418.

[15] . De Benedictis, G. Dilecce. Vibrational relaxation of N2(C,v) state in N2 pulsed rf discharges; electron impact and pooling reactions[J]. Chem. Phys., 1995, 192(1): 149-162.

[16] 胡志强, 甄汉生, 施迎难. 气体电子学[M]. 北京: 电子工业出版社, 1985. 18~22

    Hu Hanqiang, Zhen Hansheng, Shi Yingnan. Gaseous Electronics[M]. Beijing: Electonic Industry Press, 1985. 18~22

[17] 高树香, 陈宗柱. 气体导电[M]. 南京: 南京工学院出版社, 1988. 61~69

    Gao Shuxiang, Chen Zongzhu. Gaseous Conduction[M]. Nanjing: Engineering Institute Press, 1988. 61~69

孙殿平, 李炯, 杨晓华, 刘煜炎, 陈扬骎. 氮气交流放电光谱强度和电压及气压的关系[J]. 光学学报, 2008, 28(11): 2232. Sun Dianping, Li Jiong, Yang Xiaohua, Liu Yuyan, Chen Yangqin. Emission Spectral Intensity Variation with Discharge Voltage and Pressure in AC Discharge of N2[J]. Acta Optica Sinica, 2008, 28(11): 2232.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!