ZrO2陶瓷显微结构对绿光飞秒激光加工过程的协同效应

吕健; 王宏建; 曹佐; 袁莉娟; 李冰; 左飞; 周锐; 谢庆丰; 林华泰

人工晶体学报, 2020, 49 (2): 305, 网络出版: 2020-06-15

ZrO2陶瓷显微结构对绿光飞秒激光加工过程的协同效应

Synergistic Effect of Microstructure on Green Femtosecond Laser Machining Behavior of ZrO2 Ceramics

论文大纲

吕健 ¹王宏建 ¹曹佐 ¹袁莉娟 ¹李冰 ¹左飞 ^1,*周锐 ²谢庆丰 ²林华泰 ¹

作者单位

¹ 广东工业大学机电工程学院,广州 510006

² 东莞华晶粉末冶金有限公司,东莞 523850

氧化锆显微结构绿光飞秒激光表面微结构 zirconia microstructure green femtosecond laser surface microstructure

摘要

氧化锆(ZrO2)陶瓷因其性能优异，常被应用于医学与工业等领域。通过表面微纳加工可进一步发挥其性能优势，扩大应用范围。实验采用绿光飞秒激光对具有不同显微结构的ZrO2陶瓷基体进行微孔加工，结合显微结构差异对材料物理性能的影响，系统研究了激光加工功率与加工时间等工艺参数对微孔形貌、直径及深度等不同维度下形貌学特征的作用效果。结果表明，同一加工参数下，晶粒更小、显微结构更均匀、热导率更低的ZrO2具有更高的加工效率；通过对比微孔直径与深度随激光加工工艺参数的变化，发现材料显微结构的差异对微孔轴向的影响比径向更加显著。

Abstract

Zirconia (ZrO2) ceramics have been applied in medical and industrial fields due to their excellent properties. Surface micro-nano fabrication could bring their performance advantages into full play and also extend their application ranges, ZrO2 ceramic with different microstructures was investigated by green femtosecond laser mico-drilling. Combined with the influence of different microstructures on the physical properties of materials, the effects of laser machining parameters (viz. processing power and processing time) on the morphology, diameter and depth of the micro-holes were systematically studied. Results show that ZrO2 with smaller grain size, more uniform microstructure and lower thermal conductivity has higher processing efficiency under the same processing parameters. By comparing the change of the diameter and depth with the laser processing parameters, it is found that the difference of the material microstructure has more obvious effects along the axial direction of micro-hole relative to the radial direction.

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吕健, 王宏建, 曹佐, 袁莉娟, 李冰, 左飞, 周锐, 谢庆丰, 林华泰. ZrO2陶瓷显微结构对绿光飞秒激光加工过程的协同效应[J]. 人工晶体学报, 2020, 49(2): 305. LYU Jian, WANG Hongjian, CAO Zuo, YUAN Lijuan, LI Bing, ZUO Fei, ZHOU Rui, XIE Qingfeng, LIN Huatay. Synergistic Effect of Microstructure on Green Femtosecond Laser Machining Behavior of ZrO2 Ceramics[J]. Journal of Synthetic Crystals, 2020, 49(2): 305.

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