仿生蛾眼抗反射微纳结构衍射特性研究

董亭亭; 陈驰; 熊涛; 耿安兵; 付跃刚

光学与光电技术, 2017, 15 (3): 57, 网络出版: 2017-07-10

仿生蛾眼抗反射微纳结构衍射特性研究

Research on Bionic Moth-Eye Antireflective Micro-Nano Structure of Diffraction Characteristics

论文大纲

董亭亭 ^1,*陈驰 ¹熊涛 ¹耿安兵 ¹付跃刚 ²

作者单位

¹ 华中光电技术研究所—武汉光电国家实验室, 湖北武汉 430223

² 长春理工大学光电工程学院, 吉林长春 130022

摘要

通过分析仿生蛾眼抗反射阵列周期对反射率和透射率的影响,获得了波长与周期之比与反射波能量和零级透射波能量直接相关,分界线符合±1级衍射倏逝条件。在亚波长区具有低反射率和低零级透射率,而在小周期区具有低反射率和透射率。并且通过引入微结构顶面与底面直径之比圆锥度系数概念来表征微结构形状,从而能够分析圆锥形、圆台形、圆柱形仿生蛾眼微纳结构之间不同形状过渡的变化趋势,进而实现了制备微纳结构形状的误差分析。

Abstract

The relationship between the period of bionic moth-eye antireflection array and reflectivity and transmissivity is analyzed, and it can be obtained that the ratio of wavelength to period is directly related to reflected and zeroth-order transmitted wave energy, of which the dividing line accords with the first-order (±1) evanescent condition of diffraction. It characterizes low reflectivity and low zeroth-order transmissivity in the sub-wavelength region, which contrasts the low reflectivity and transmissivity in small periodic region. The ratio of the top surface to bottom surface diameter of micro-nano structure is introduced as the concept of conic coefficient to characterize the profile of the micro-nano structure for the purpose of discussing the changing trend of different shapes between conical, truncated conical and cylindrical bionic moth-eye micro-nano structure. Consequently, the error analysis of the fabrication of micro-nano structure is realized.

参考文献

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董亭亭, 陈驰, 熊涛, 耿安兵, 付跃刚. 仿生蛾眼抗反射微纳结构衍射特性研究[J]. 光学与光电技术, 2017, 15(3): 57. DONG Ting-ting, CHEN Chi, XIONG Tao, GENG An-bing, FU Yue-gang. Research on Bionic Moth-Eye Antireflective Micro-Nano Structure of Diffraction Characteristics[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2017, 15(3): 57.

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