中国激光, 2009, 36 (3): 713, 网络出版: 2009-03-17   

飞秒激光蚀刻光纤微腔及其在光纤环衰荡腔中的应用

Micro-Cavity Fabricated by Femtosecond Lasers and Its Application in Fiber-Loop Ring-Down Spectroscopy
作者单位
南开大学现代光学研究所 光电信息技术教育部重点实验室, 天津 300071
摘要
为了实现在光纤环衰荡腔(FLRD)系统中的微量气体液体传感,提出了利用飞秒激光微纳加工的方法加工微流体传感装置。利用800 nm的飞秒激光脉冲在普通980 nm,1550 nm的单模光纤上实现了直写光学微腔,微腔的宽度达到4 μm,深度80 μm。将在单模光纤刻蚀的光学微腔成功应用于光纤环衰荡腔系统之中。针对光纤环衰荡腔的系统装置,分析了该系统的探测原理,并对该系统应用于微流体吸收探测中所探测的衰荡时间、损耗及待测流体浓度的关系进行理论推导。利用此系统,实现了对微量流体浓度的吸收谱高灵敏度探测。
Abstract
In order to realize the sensing probe of micro-scale liquid and gas in fiber cavity ring-down spectroscopy system, a new method of fabricating microfluidic sensing devices is proposed. The micro-cavity on single mode 980 nm and 1550 nm fibers by direct writing is achieved with a focused near-IR 800 nm femtosecond laser beam. The width of the cavity is 4 μm, with the depth of 80 μm. The micro cavity directly written by femtosecond laser is successfully applied into fiber-loop ring-down (FLRD) spectroscopy, and its detection principle is analyzed. It is used in micro-cavity liquid absorb detection, and the relation between the detected ring-down time, the loss and the liquid concentration is deduced. With this micro-cavity, FLRD spectroscopy can realize gas and fluidic absorption measurement on micro-scale.
参考文献

[1] . 光纤腔衰荡光谱技术及其最新进展[J]. 物理学进展, 2008, 28(4): 76-83.

    . . Fiber cavity ringdown spectroscopy and the latest progress[J]. Progress in Physics, 2008, 28(4): 76-83.

[2] A.C.R.Pipino, J.W.Hudgen, R.E. Huie. Evanescent wave cavity ring-down spectroscopy for probing surface process[J]. Chem. Phys. Lett.,1997,280(1-2):104~112

[3] . Gupta, H. Jiao, A. O’Keefe.Cavity-enhanced spectroscopy in optical fibers[J]. Opt. Lett., 2002, 27(21): 1878-1880.

[4] . Temperature and strain sensor based on weak LPG and fiber ring down[J]. Microwave and Optical Technology Letters, 2008, 50(1): 111-114.

[5] . Steward,K.Atherton,H.B.Yu et al.. An investigation of an optical fibre amplifier loop for intra-cavity and ringdown cavity loss measurement[J]. Measurement Science and Technology, 2001, 12(7): 843-849.

[6] . G.Tong,M.Jakubinek,A.Wright et al.. Fiber-loop ring-down spectroscopy: A sensitive absorption technique for small liquid samples[J]. Review of Scientific Instruments, 2003, 74(11): 4818-4826.

[7] . Jakubinek, Z.G Tong, S. Manzhos et al. Configuration of ring-down spectrometers for maximum sensitivity[J]. Canadian Journal of Chemistry-Revue Canadienne De Chimie, 2004, 82(6): 873-879.

[8] . P.Loock. Ring-down absorption spectroscopy for analytical microdevices[J]. Trac-Trends in Analytical Chemistry, 2006, 25(7): 655-664.

[9] . Oleschuk. Capillary electrophoresis absorption detection using fiber-loop ring-down spectroscopy[J]. Anal. Chem., 2006, 78: 5685-5692.

[10] . 飞秒激光精细微纳加工的研究进展[J]. 物理, 2006, 35(8): 679-683.

    . Femtosecond laser micro-nano fabrication[J]. Physics, 2006, 35(8): 679-683.

[11] 杨洗陈,汪刚,赵友博 等.飞秒激光制备阵列孔金属微滤膜[J].中国激光,2007,34(8):1155~1158

    Yang Xichen, Wang Gang, Zhao Youbo et al.. Femtosecond laser processing of arrayed micro holes of metal filtration membrane[J]. Chin. J. Lasers,2007,34(8):1155~1158

[12] Xiaohui Sun, Changhe Zhou, Huayi Ru et al.. Laser writing system for fabrication of diffractive optics elements[J]. Chin. Opt. Lett.,2004,2(1):4~6

[13] 何飞,程亚. 飞秒激光微加工:激光精密加工领域的新前沿[J]. 中国激光, 2007,34(5):595~622

    He Fei, Cheng Ya. Femtosecond laser micromaching: frontier in laser precision micromachining[J]. Chinese. J. Lasers,2007,34(5):595~622

[14] . . Fabrication of microfluidic optical waveguides on glass chips with femtosecond laser pulses[J]. Opt. Lett., 2007, 32(11): 1536-1538.

[15] 孙晓慧,周常河,余昺鲲 等.飞秒激光加工最新进展[J]. 激光与光电子学进展,2004,41(9):37~45

    Sun Xiaohui, Zhou Changhe, Yu Bingkun et al.. The development of femtosecond laser processing[J]. Laser & Optoelectronics Progress, 2004, 41(9):37~45

张绮, 张伟刚, 张健, 刘卓琳, 姜萌, 刘亚萍, 林锦海. 飞秒激光蚀刻光纤微腔及其在光纤环衰荡腔中的应用[J]. 中国激光, 2009, 36(3): 713. Zhang Qi, Zhang Weigang, Zhang Jian, Liu Zhuolin, Jiang Meng, Liu Yaping, Lin Jinhai. Micro-Cavity Fabricated by Femtosecond Lasers and Its Application in Fiber-Loop Ring-Down Spectroscopy[J]. Chinese Journal of Lasers, 2009, 36(3): 713.

本文已被 8 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!