中国激光, 2015, 42 (7): 0703006, 网络出版: 2022-09-24
激光刻蚀聚酰亚胺基底铝薄膜的温度场模拟
Simulation of Temperature Field for Laser Etching of Aluminum Thin Films on Polyimide Substrate
引用该论文
刘孝丽, 熊玉卿, 杨建平, 王瑞, 吴敢, 任妮. 激光刻蚀聚酰亚胺基底铝薄膜的温度场模拟[J]. 中国激光, 2015, 42(7): 0703006.
Liu Xiaoli, Xiong Yuqing, Yang Jianping, Wang Rui, Wu Gan, Ren Ni. Simulation of Temperature Field for Laser Etching of Aluminum Thin Films on Polyimide Substrate[J]. Chinese Journal of Lasers, 2015, 42(7): 0703006.
刘孝丽, 熊玉卿, 杨建平, 王瑞, 吴敢, 任妮. 激光刻蚀聚酰亚胺基底铝薄膜的温度场模拟[J]. 中国激光, 2015, 42(7): 0703006. Liu Xiaoli, Xiong Yuqing, Yang Jianping, Wang Rui, Wu Gan, Ren Ni. Simulation of Temperature Field for Laser Etching of Aluminum Thin Films on Polyimide Substrate[J]. Chinese Journal of Lasers, 2015, 42(7): 0703006.
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