光学学报, 2012, 32 (10): 1031002, 网络出版: 2012-07-17
提高极紫外光谱纯度的多层膜设计及制备
Design and Fabrication of the Multilayer Film of Enhancing Spectral-Purity in Extreme Ultraviolet
Metrics
摘要访问:8197次
PDF 下载:393次
全文浏览:11次
总被查询:0次
祝文秀, 金春水, 匡尚奇, 喻波. 提高极紫外光谱纯度的多层膜设计及制备[J]. 光学学报, 2012, 32(10): 1031002. Zhu Wenxiu, Jin Chunshui, Kuang Shangqi, Yu Bo. Design and Fabrication of the Multilayer Film of Enhancing Spectral-Purity in Extreme Ultraviolet[J]. Acta Optica Sinica, 2012, 32(10): 1031002.