目前投射电容式触摸屏被广泛应用于智能手机等移动终端, 本文总结了常见触摸屏的基本原理和结构, 重点讲述了内置触控技术的发展。全内置触控技术(full In-cell)将触控IC和显示IC整合在一起, 有利于降低成本、实现薄型化, 是触控发展的终极目标。为了提升非晶硅产品的附加值, 制备了13.46 cm触摸屏, 触控走线和数据线位于同层并行排列, 相较现有技术, 省去了有机膜层和第三金属层(M3), 工艺制程和非In-cell产品完全一致, 至少可以节省两张光罩, 材料成本和制程优势明显。触控采用小坑扫描方式可以达到120 Hz, 关键触控性能指标准确度、精确度、线性度及抖动均可满足行业标准, 且显示性能和可靠性可达到非In-cell产品同等水平。

Projected capacitive touch panels are widely used in mobile terminals. This paper introduced the principles and structures of common touch panels, focusing on the development of full In-cell technology. Full In-cell touch panels were realized by embedding touch IC into LCD IC, which can decrease the thickness of the module, and will become the mainstream. The 13.46 cm a-Si full In-cell touch panels were produced. Touch lines and data lines were set at the same layer. Organic layer and metal3 layer were omitted. Compared with the developed technology, two masks were saved at least. The costs reduces and the process is simplified. The touch frequency is 120 Hz. The key touch performances such as accuracy, precision, linearity and jitter can reach the industrial standards. The optical and reliability performances are comparable with the non In-cell pands.