中国激光, 2012, 39 (5): 0502010, 网络出版: 2012-04-13   

反射各向异性谱在线监测852 nm半导体激光器AlGaInAs/AlGaAs量子阱的MOCVD外延生长

MOCVD Growth of AlGaInAs/AlGaAs Quantum Well for 852 nm Laser Diodes Studied by Reflectance Anisotropy Spectroscopy
作者单位
1 中国科学院长春光学精密机械与物理研究所发光学及应用国家重点实验室, 吉林 长春 130033
2 中国科学院研究生院, 北京 100049
引用该论文

徐华伟, 宁永强, 曾玉刚, 张星, 张建伟, 张建, 张立森. 反射各向异性谱在线监测852 nm半导体激光器AlGaInAs/AlGaAs量子阱的MOCVD外延生长[J]. 中国激光, 2012, 39(5): 0502010.

Xu Huawei, Ning Yongqiang, Zeng Yugang, Zhang Xing, Zhang Jianwei, Zhang Jian, Zhang Lisen. MOCVD Growth of AlGaInAs/AlGaAs Quantum Well for 852 nm Laser Diodes Studied by Reflectance Anisotropy Spectroscopy[J]. Chinese Journal of Lasers, 2012, 39(5): 0502010.

参考文献

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    Zhang Yan, Ning Yongqiang, Wang Ye et al.. High power vertical-cavity surface-emitting laser array with small divergence[J]. Chinese J. Lasers, 2010, 37(9): 2428~2432

[2] 崔锦江, 宁永强, 姜琛昱 等. 大功率垂直腔底发射半导体激光器的光束质量[J]. 中国激光, 2011, 38(1): 0102002

    Cui Jinjiang, Ning Yongqiang, Jiang Chenyu et al.. Beam quality of high power vertical-cavity bottom-emitting semiconductor lasers[J]. Chinese J. Lasers, 2011, 38(1): 0102002

[3] 王伟, 宁永强, 张金龙 等. 高功率垂直腔底发射激光器的偏振特性[J]. 中国激光, 2012, 39(3): 0302002

    Wang Wei, Ning Yongqiang, Zhang Jinlong et al.. Polarization properties of high-power vertical-cavity bottom-emitting lasers[J]. Chinese J. Lasers, 2012, 39(3): 0302002

[4] Zhang Yan, Ning Yongqiang, Zhang Lisen et al.. Design and comparison of GaAs, GaAsP and InGaAlAs quantum-well active regions for 808-nm VCSELs[J]. Opt. Express, 2011, 19(13): 12569~12581

[5] M. Zorn, J. T. Zettler, A. Knaller et al.. In situ determination and control of AlGaInP composition during MOVPE growth[J]. Journal of Crystal Growth, 2006, 287(2): 637~641

[6] F. Bugge, M. Zorn, V. Zeimer et al.. MOVPE growth of InGaAs/GaAsP-MQWs for high power laser diodes studied by reflectance anisotropy spectroscopy[J]. Journal of Crystal Growth, 2009, 311(4): 1065~1069

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徐华伟, 宁永强, 曾玉刚, 张星, 张建伟, 张建, 张立森. 反射各向异性谱在线监测852 nm半导体激光器AlGaInAs/AlGaAs量子阱的MOCVD外延生长[J]. 中国激光, 2012, 39(5): 0502010. Xu Huawei, Ning Yongqiang, Zeng Yugang, Zhang Xing, Zhang Jianwei, Zhang Jian, Zhang Lisen. MOCVD Growth of AlGaInAs/AlGaAs Quantum Well for 852 nm Laser Diodes Studied by Reflectance Anisotropy Spectroscopy[J]. Chinese Journal of Lasers, 2012, 39(5): 0502010.

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