中国光学, 2020, 13 (4): 873, 网络出版: 2020-08-17
超薄氮化镓基LED悬空薄膜的制备及表征 
下载： 557次
Fabrication and characterization of ultra-thin GaN-based LED freestanding membrane
图 & 表
图 1. 超薄氮化镓基LED悬空薄膜工艺流程图
Fig. 1. Fabrication process of ultra-thin GaN-based LED freestanding membrane
图 2. 剥离硅衬底的直径为800 μm的LED悬空薄膜的 (a)正面光镜图及(b)白光干涉仪获得的悬空薄膜三维变形图
Fig. 2. LED freestanding membrane with 800 μm diameter after removing silicon substrate. (a) Top-view optical microscope image, (b) 3D deformation image obtained by white light interferometer
图 3. 具有不同直径的LED悬空薄膜的变形情况。 (a)掏空硅衬底，(b)背后减薄一次，（c）背后减薄两次
Fig. 3. Deformations of LED freestanding membranes with different diameters. (a) Removing silicon substrate, (b) thinning the backside once, (c) thinning the backside twice
图 4. 具有不同厚度LED悬空薄膜的反射谱
Fig. 4. Reflectance spectra of LED freestanding membranes with different thicknesses
图 5. 正面激发下不同厚度LED悬空薄膜的光致发光谱
Fig. 5. Photoluminescence spectra of LED freestanding membranes with different thicknesses under front excitation
李欣, 沙源清, 蒋成伟, 王永进. 超薄氮化镓基LED悬空薄膜的制备及表征[J]. 中国光学, 2020, 13(4): 873. Xin LI, Yuan-qing SHA, Cheng-wei JIANG, Yong-jin WANG. Fabrication and characterization of ultra-thin GaN-based LED freestanding membrane[J]. Chinese Optics, 2020, 13(4): 873.
PDF全文
