红外与毫米波学报, 2012, 31 (1): 5, 网络出版: 2012-02-13  

甲烷流量对8.5代非晶硅光伏组件P层材料结构和光学性质的影响

Effect of CH4 flow rate on the optical properties of Boron-doped a-SiC:H films
作者单位
1 中国科学院上海技术物理研究所 红外物理国家重点实验室,上海 200083
2 尚德太阳能电力有限公司,上海 201114
3 江南大学,物联网工程学院,江苏 无锡 214122
引用该论文

窦亚楠, 何悦, 马晓光, 乔琦, 陈肖静, 王永谦, 陈绍斌, 褚君浩. 甲烷流量对8.5代非晶硅光伏组件P层材料结构和光学性质的影响[J]. 红外与毫米波学报, 2012, 31(1): 5.

DOU Ya-Nan, HE Yue, MA Xiao-Guang, QIAO Qi, CHEN Xiao-Jing, WANG Yong-Qian, CHEN Robin, CHU Jun- Hao. Effect of CH4 flow rate on the optical properties of Boron-doped a-SiC:H films[J]. Journal of Infrared and Millimeter Waves, 2012, 31(1): 5.

参考文献

[1] Vetter M, Borrajo J P, and Andreu J. Fabrication of very large 2.6 m×2.2 m amorphous silicon olar modules on glass[C]. Proceedings of the 2009 Spanish Conference on Electron Devices,2009,406-409.

[2] Tawada T, Tsuge K, Kondo M et al. Properties and structure of a-SiC:H for high-efficiency a-Si solar-cell[J]. Journal of Applied Physics,1982,53(7):5273-5281.

[3] Bullot J and Schmidt M P. Physics of amorphous-silicon carbon alloys[J]. Physica Status Solidi B-Basic Research,1987,143(2):345-418.

[4] Ambrosone G, Coscia U, Ferrero S et al. Structural and optical properties of hydrogenated amorphous silicon-carbon alloys grown by plasma-enhanced chemical vapour deposition at various rf powers[J]. Philosophical Magazine B-Physics of Condensed Matter Statistical Mechanics Electronic Optical and Magnetic Properties,2002,82(1):35-46.

[5] Akaoglu B, Gulses A, Atilgan I et al. Influences of carbon content and power density on the PECVD grown a-Si1-x: Cx : H thin films[J]. Vacuum,2006,81(1):120-125.

[6] Akaoglu B, Sel K, Atilgan I, et al. Carbon content influence on the optical constants of hydrogenated amorphous silicon carbon alloys[J]. Optical Materials,2008,30(8):1257-1267.

[7] Maley N and Lannin J S. Influence of hydrogen on vibrational and optical-properties of a-Si1-xHx alloys[J]. Physical Review B,1987,36(2):1146-1152.

[8] Mui K, Basa D K, Smith F W. et al. Optical-constants of a series of amorphous hydrogenated silicon-carbon alloy-films-dependence of optical-response on film microstructure and evidence for homogeneous chemical ordering[J]. Physical Review B,1987,35(15):8089-8102.

窦亚楠, 何悦, 马晓光, 乔琦, 陈肖静, 王永谦, 陈绍斌, 褚君浩. 甲烷流量对8.5代非晶硅光伏组件P层材料结构和光学性质的影响[J]. 红外与毫米波学报, 2012, 31(1): 5. DOU Ya-Nan, HE Yue, MA Xiao-Guang, QIAO Qi, CHEN Xiao-Jing, WANG Yong-Qian, CHEN Robin, CHU Jun- Hao. Effect of CH4 flow rate on the optical properties of Boron-doped a-SiC:H films[J]. Journal of Infrared and Millimeter Waves, 2012, 31(1): 5.

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