基于单步驱动的激光共焦显微镜快速定焦方法

於维华; 王允; 邱丽荣; 吴寒旭; 赵维谦

光学技术, 2019, 45 (5): 535, 网络出版: 2020-01-07

基于单步驱动的激光共焦显微镜快速定焦方法

Fast focusing method based on single-step driving laser confocal microscope

论文大纲

於维华 ^*王允邱丽荣吴寒旭赵维谦

作者单位

北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室, 北京 100081

光学测量共焦快速定焦单步驱动 optical measurement confocal fast focus identification single step drive

摘要

针对现有共焦显微镜中定焦速度慢和定焦精度差的问题, 提出了基于单步驱动的激光共焦显微镜快速定焦方法。充分利用轴向扫描器件的响应时间通过单步驱动获取数据, 大幅提高采集速度, 提高系统信噪比；通过拟合区间优化和分开拟合的数据处理方法来快速、准确获取定焦目标位置, 进而实现激光共焦显微镜轴向定焦效率的提升。理论分析与实验结果表明: 与现有定焦方法相比, 方法在粗定焦阶段使定焦速度提升5.64倍, 在准确定焦阶段使定焦速度提升3.08倍, 其有效提升了现有共焦显微镜的轴向定焦速度和精度。

Abstract

Aiming at the problem of slow speed and poor precision of focusing in existing confocal microscopes, this paper proposes a fast focusing method based on single-step driving laser confocal microscope. The method firstly acquires data based on single-step driving of axial scanner. Then, by fitting the interval-optimized data processing method, the position of the focus identification can be quickly and accurately obtained, thereby improving the imaging speed and accuracy of the laser confocal microscope. Theoretical analysis and experimental results show that compared with the existing focus identification method, the method increases the focus identification speed by 5.64 times in the coarse focus identification stage and 3.08 times in the quasi-determined focus stage, which effectively improves the axial focus identification speed and speed of the confocal microscope.

参考文献

[1] Fogagnolo P, Iester M, Liang H, et al. Advances in confocal microscopy of the eye［J］. Biomed Research International,2016,2016(4):1794240.

[2] Martisek D, Prochazkova J. The enhancement of 3D scans depth resolution obtained by confocal scanning of porous materials［J］. Measurement Science Review,2017,17(6):273-281.

[3] 宋树权, 左敦稳, 赵世田. 基于激光扫描共焦显微技术的刀具刃口精密测量［J］. 华南理工大学学报:自然科学版,2014,42(7):86-90.

Song Shuquan, Zuo Dunwen, Zhao Shitian. Precision measurement of cutting edge based on laser scanning confocal microscopy［J］. Journal of South China University of Technology :Natural Science Edition,2014,42(7):86-90.

[4] 刘学吉, 王省书, 周金鹏, 等. 光电自准直系统的建模方法研究［J］. 半导体光电,2016,37(4):545-551.

Liu Xueji, Wang Xingshu. Zhou Jinpeng, et al. Research on the model of photoelectric auto-collimating system［J］. Semiconduc- tor Optoelectronics,2016,37(4):545-551.

[5] 卫雅欣, 李杏华, 黄银国, 等. 基于平行光管的星敏感器焦平面离焦距离检测设备设计及其误差分析［J］. 世界科技研究与发展,2016,38(1):85-89.

Wei Yaxin, Li Xinhua, Huang Yinguo, et al. Design and error analysis of detection device of focal plane’s defocusing distance of star sensors based on collimator［J］. World Sci-Tech R&D,2016,38(1):85-89.

[6] 段存丽, 范明国, 王涛, 等. 基于评价函数的光电定焦方法研究［J］. 光学与光电技术,2014,12(1):59-62.

Duan Cunli, Fan Mingguo, Wang Tao, et al. Study on photoelectric focusing method based on evaluation function［J］. Optical & Optoelectronic Technology,2014,12(1):59-62.

[7] Smith W. Modern optical engineering［M］. 3rd Edition. New York: The McGraw-Hill Companies Inc,2000:340-350.

[8] Zhao Weiqian, Sun Ruoduan, Qiu Lirong, et al. Laser differential confocal radius measurement［J］. Optics Express,2010,18(3):2345-60.

[9] 张丰收, 李斯文, 胡志刚, 等. 一种改进的Sobel梯度函数自动对焦评价算法［J］. 光学技术,2017,43(3):234-238.

Zhang Fengshou, Li Siwen, Hu Zhigang, et al. An improved auto-focus evaluating algorithm based on sobel gradient function［J］. Optical Technique,2017,43(3):234-238.

[10] Chenzi Guo, Zelong Ma, Xu Guo, et al. Fast auto-focusing search algorithm for a high-speed and high-resolution camera based on the image histogram feature function［J］. Applied Optics,2018,57(34):44-49.

[11] Sun Yingbin, Zhao Weiqian, Qiu Lirong, et al. Unilateral- shift-subtracting confocal microscopy with nanoscale axial focusing precision［J］. Applied Optics,2018,57(30):8876-8886.

[12] Tan Jiubin, Liu Chenguang, Liu Jian, et al. Sinc2 fitting for height extraction in confocal scanning［J］. Measurement Science and Technology,2016,27(2):025006.

[13] Zhao Weiqian, Sheng Zhong, Qiu Lirong, et al. Bilateral fitting subtracting confocal microscopy［J］. Applied Optics,2016,55(36):10269.

[14] 毛新越, 赵维谦, 王允, 等. 激光差动共焦显微成像中的轴向快速定焦方法［J］. 光学技术,2015,41(5):385-389.

Mao Xinyue, Zhao Weiqian, Wang Yun, et al. The method of axial fast identified focus of laser differential confocal microscopy imaging［J］. Optical Technique,2015,41(5):385-389.

[15] Qiu Lirong, Liu Dali, Zhao Weiqian, et al. Real-time laser differential confocal microscopy without sample reflectivity effect［J］. Optics Express,2014,22(18):21626-21640.

[16] 李颂华, 左闯, 张丽秀, 等. 压电陶瓷驱动器的力输出特性［J］. 沈阳建筑大学学报:自然科学版,2018,34(2):350-358.

Li Songhua, Zuo Chuang, Zhang Lixiu, et al. Fore output characteristic of piezoelectric actuators［J］. Journal of Shenyang Jianzhu University:Natural Science Edition,2018,34(2):350-358.

[17] 崔晗, 王允, 邱丽荣, 等. 基于二次曲线拟合的共焦拉曼光谱探测方法［J］. 光谱学与光谱分析,2016,36(12):3958-3962.

Cui Han, Wang Yun, Qiu Lirong, et al. Confocal raman spectroscopy method based on quadratic curve fitting［J］. Spectroscopy and Spectral Analysis,2016,36(12):3958-3962.

於维华, 王允, 邱丽荣, 吴寒旭, 赵维谦. 基于单步驱动的激光共焦显微镜快速定焦方法[J]. 光学技术, 2019, 45(5): 535. YU Weihua, WANG Yun, QIU Lirong, WU Hanxu, ZHAO Weiqian. Fast focusing method based on single-step driving laser confocal microscope[J]. Optical Technique, 2019, 45(5): 535.

基于单步驱动的激光共焦显微镜快速定焦方法

关于本站 Cookie 的使用提示

全站搜索

基于单步驱动的激光共焦显微镜快速定焦方法

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索