扫描镜动态性能的自准直检测技术研究

为检验扫描镜的动态性能，提出了一种动态自准直检测方法，该方法巧妙地将被检扫描镜和动态靶标上目标模拟反射镜纳入动态光电自准直仪准直光束的传播路径中,并构成闭合的光学自准直测量回路。设计了扫描镜动态性能的自准直检测装置，并利用自准直方法对动态靶标的自身精度进行标定。实验结果表明，动态靶标在360°的范围内的动态精度为±15 μrad，可检测最大速度为80°/s，最大加速度为50°/s2。将该检测方法和装置应用于某型号空间激光照明成像跟踪系统中扫描镜的方位轴、俯仰轴独立性能的检验，获得了相应的静态轴系晃动、阶跃响应和连续跟踪等性能数据，为扫描镜的性能改进提供了参考和帮助。

Abstract

To evaluate the dynamic performance of the scanning mirror, a dynamic autocollimation method is presented. The scanning mirror under test and the rotating mirror for target simulation fixed on the dynamic target are skillfully incorporated into the collimated beam propagation path of a dynamic autocollimator, constituting a close loop of optical auto-collimation measurement. The measurement system of performance inspection for the scanning mirror based on dynamic autocollimation is designed, and the calibration method for the accuracy of the dynamic target based on autocollimation is introduced. Experimental results show that the dynamic accuracy of the autocollimation measurement system is ±15 μrad in the 360° rotation range, and the maximum velocity and acceleration available for test are 80°/s and 50°/s2, respectively. The test method and device are used to test the dynamic performances of each axis individually of the scanning mirror adopted in a space laser illumination imaging tracking system. Related test data including wobble of shaft, step response, and continuous tracking are acquired, which will provide reference and help for the performance improvement of the scanning mirror.

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高敏, 卞正兰, 董作人, 叶青, 方祖捷, 瞿荣辉. 扫描镜动态性能的自准直检测技术研究[J]. 中国激光, 2011, 38(2): 0208001. Gao Min, Bian Zhenglan, Dong Zuoren, Ye Qing, Fang Zujie, Qu Ronghui. Research on Performance Test of Scanning Mirror Based on Dynamic Autocollimation[J]. Chinese Journal of Lasers, 2011, 38(2): 0208001.

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