光学学报, 2020, 40 (17): 1705001, 网络出版: 2020-08-26
大角度倾斜照明条件下的PIE迭代重建算法研究 
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Reconstruction Algorithm for Ptychographic Iterative Engine with Highly Tilted Illumination
图 & 表
图 1. 大角度PIE原理示意图。(a)光路原理图;(b)算法流程图
Fig. 1. Schematic diagram of PIE with highly tilted illumination. (a) Optical path schematic; (b) flowchart of the algorithm
图 2. 不同入射角度下的光斑分布图。(a)利用惠更斯-菲涅耳叠加积分计算的大角度衍射光斑;(b)利用大角度角谱计算的衍射光斑;(c) 3°时对应的衍射光斑;(d) 0°时对应的衍射光斑
Fig. 2. Diffraction patterns with different incident angles. (a) Diffraction pattern calculated by spherical wave integration based on Huygens-Fresnel principle with large incident angle; (b) diffraction pattern calculated by the revised angular spectrum with the same incident angle; (c) diffraction pattern when the incident angle is 3°; (d) diffraction pattern when the incident angle is 0°
图 3. 模拟初始值。(a)样品振幅;(b)样品相位;(c)照明光振幅;(d)照明光相位
Fig. 3. Simulated initial value. (a) Amplitude of specimen; (b) phase of specimen; (c) amplitude of probe light; (d)phase of probe light
图 5. 大角度下普通ePIE重建结果(500次迭代)。(a)物体振幅;(b)物体相位;(c)照明光振幅;(d)照明光相位
Fig. 5. Reconstructed results based on general ePIE algorithm with highly tilted illumination after 500 iterations. (a) Amplitude of specimen; (b) phase of specimen; (c) amplitude of probe light; (d) phase of probe light
图 6. 基于大角度角谱计算方法的ePIE重建结果(500次迭代)。(a)物体振幅;(b)物体相位;(c)照明光振幅;(d)照明光相位
Fig. 6. Reconstructed results based on revised angular spectrum and ePIE after 500 iterations. (a) Amplitude of specimen; (b) phase of specimen; (c) amplitude of probe light; (d) phase of probe light
图 8. 角度误差分别为-1.5°、0°和1.5°时的重建结果。(a)照明光振幅;(b)照明光频谱;(c)物体振幅;(d)角度误差变化时的误差曲线
Fig. 8. Reconstructed results at the angle errors from -1.5° to 1.5°. (a) Reconstructed amplitude of probe light; (b) spectrum intensity of probe light; (c) amplitude of specimen; (d)error curve with the change of different angle errors
图 9. 部分衍射光斑阵列(坐标对应衍射光斑在10×10阵列中的位置信息)
Fig. 9. Part of diffraction patterns recorded by CCD, in which the coordinates represent the position information among the grid of 10×10
图 10. 基于大角度角谱计算方法的ePIE实验结果。(a)物体振幅;(b)物体相位;(c)照明光振幅;(d)照明光相位
Fig. 10. Experimental results based on revised angular spectrum and ePIE with highly tilted illumination. (a) Amplitude of specimen; (b) phase of specimen; (c) amplitude of probe light; (d) phase of probe light
图 11. 大角度下普通ePIE重建实验结果。(a)物体振幅;(b)物体相位;(c)照明光振幅;(d)照明光相位
Fig. 11. Experimental results based on general ePIE algorithm with highly tilted illumination. (a) Amplitude of specimen; (b) phase of specimen; (c) amplitude of probe light; (d) phase of probe light
图 12. 两种算法对应的误差曲线
Fig. 12. Experimental error curves corresponding to the two calculation methods
图 13. 两种不同方法恢复的标准分辨率板(USAF 1951)。(a)采用本文提出算法的重建结果;(b) 图(a)的局部放大;(c)相同数据下利用普通ePIE的重建结果;(d)图(c)的局部放大
Fig. 13. Experimental results of USAF 1951 test target. (a) Reconstructed results with the proposed algorithm; (b) locally enlarged view of Fig. 13 (a); (c) reconstructed results with the traditional ePIE algorithm; (d) locally enlarged view of Fig. 13 (c)
昌成成, 潘兴臣, 陶华, 刘诚, 朱健强. 大角度倾斜照明条件下的PIE迭代重建算法研究[J]. 光学学报, 2020, 40(17): 1705001. Chengcheng Chang, Xingchen Pan, Hua Tao, Cheng Liu, Jianqiang Zhu. Reconstruction Algorithm for Ptychographic Iterative Engine with Highly Tilted Illumination[J]. Acta Optica Sinica, 2020, 40(17): 1705001.
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