变形反射镜作为超分辨成像系统中的光瞳滤波器，可以灵活快速地调制光场相位的性能。采用遗传算法设计具有不同超分辨参数的光瞳相位结构，通过修改自适应光学系统闭环参考矩阵实现对光瞳滤波器相位的闭环拟合。在此基础上，实验对比了不同光瞳滤波情形下的超分辨成像效果。结果表明，变形反射镜可以很好地拟合设计的光瞳滤波器相位，超分辨成像参数与理论设计值基本吻合。由于变形反射镜采用反射式并通过控制镜面面形进行超分辨光瞳相位拟合，在使用时对入射光无偏振态要求，有利于该方法的实际应用。

In this paper, a deformable mirror is employed as a pupil filter in a super-resolution imaging system because it can be used to modulate optical field phase quickly and flexibly. The genetic algorithm is adopted to design pupil phase structures with different super-resolution parameters, and the closed-loop phase fitting of pupil filter is realized by modifying the closed-loop reference matrix of the adaptive optics system. On this basis, the experiments are conducted to compare the super-resolution imaging results with different pupil filter situations. The experimental results show that the deformable mirror can well fit the designed phase of pupil filter and the super-resolution imaging parameters are in agreement with theoretical predictions. The deformable mirror processes phase fitting of super-resolution pupil by employing reflective type and controlling mirror′s shape. This method has no requirement of polarization state of incident light, and it is in favor of practical application.