用于纳米测量的单频偏振激光干涉仪的光路集成方法
刘彬彬, 李立艳, 杨军, 苑立波. 用于纳米测量的单频偏振激光干涉仪的光路集成方法[J]. 中国激光, 2010, 37(10): 2582.
Liu Binbin, Li Liyan, Yang Jun, Yuan Libo. Optical Circuit Integrated Method of Single-Frequency Polarization Laser Interferometer for Nanometer Measurement[J]. Chinese Journal of Lasers, 2010, 37(10): 2582.
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刘彬彬, 李立艳, 杨军, 苑立波. 用于纳米测量的单频偏振激光干涉仪的光路集成方法[J]. 中国激光, 2010, 37(10): 2582. Liu Binbin, Li Liyan, Yang Jun, Yuan Libo. Optical Circuit Integrated Method of Single-Frequency Polarization Laser Interferometer for Nanometer Measurement[J]. Chinese Journal of Lasers, 2010, 37(10): 2582.