基于CMOS传感器的高速高精度激光光束自动准直系统

设计了一套激光光束自动准直系统，能够高速、高精度地自动准直激光输出方向。该系统使用了由小孔衍射放大光束抖动的光路和互补金属氧化物半导体传感器组成的传感模块；系统的信号处理模块是以现场可编程门阵列芯片为核心的电路装置，可实现高速计算和反馈控制功能。软件方面，采用了自动定标的算法来确定自动准直过程中所需的驱动信号，可以使光路调节过程中的水平和竖直方向解耦合，提高了调节的精度和速度。该算法可以实现更高程度的自动化控制。设计了实验以验证自动准直系统性能，结果表明，该装置的调整精度为2.5 μm，反馈控制频率约为1 kHz，可显著降低频率在1 kHz以下的光束抖动。

Abstract

A new system is developed to adaptively collimate laser beam direction, with high speed and high accuracy. The sensing module of this system consists of an optical layout using pinhole to amplify the beam drift and a complementary metal-oxide-semiconductor transistor sensor. An field programmable gate array chip is the core of the signal processing module to perform high speed calculation and feedback control. At the aspect of software, an algorithm is designed to derive the driving signal for automatic alignment, which is capable of uncoupling the horizontal and vertical adjustment and suitable for highly accurate automatic control. Experiments are conducted to test the performance of the system. Results show that, the system implements feedback control with accuracy of 2.5 μm and the feedback frequency about 1 kHz, and can obviously reduce the beam drifting with the frequency below 1 kHz.

参考文献

[1] N L Wagner, E A Gibson, T Popmintchev, et al.. Self-compression of ultrashort pulses through ionization-induced spatiotemporal reshapings[J]. Phys Rev Lett, 2003, 97(17): 173902.

[2] E Gagnon, I Thomann, A Paul, et al.. Long-term carrier-envelope phase stability from a grating-based chirped pulse amplifier[J]. Opt Lett, 2006, 31(12): 1866-1868.

[3] 彭滟, 徐晗, 杨旋, 等. 载波包络相位稳定的6 fs超快强激光脉冲及其在高次谐波产生中的应用[J]. 中国激光, 2006, 33(11): 1486-1489.

Peng Yan, Xu Han, Yang Xuan, et al.. Generation of carrier-envelope-phase stabilized 6 fs ultrashort pulses and their application in high-order harmonic generation[J]. Chinese J Lasers, 2006, 33(11): 1486-1489.

[4] R Velotta, N Hay, M B Mason, et al.. High-order harmonic generation in aligned molecules[J]. Phys Rev Lett, 2001, 87(18): 183901.

[5] Y Wu, D French, I Jovanovic. Passive beam pointing stabilization[J]. Opt Lett, 2010, 35(2): 250-252.

[6] F Breitling, R S Weigel, M C Downer, et al.. Laser pointing stabilization and control in the submicroradian regime with neural networks[J]. Rev Sci Instrum, 2001, 72(2): 1339-1342.

[7] I Yamada, K Narihara, K Yamauchi, et al.. Active control of laser beam direction for LHD YAG Thomson scattering[J]. Rev Sci Instrum, 2001, 72(1): 1126-1128.

[8] T Kanai, A Suda, S Bohman, et al.. Pointing stabilization of a high-repetition-rate high-power femtosecond laser for intense few-cycle pulse generation[J]. Appl Phys Lett, 2008, 92(6): 061106.

[9] D Liu, F Lv, J Cao, et al.. Design and application of a laser beam alignment system based on the imaging properties of a multi-pass amplifier[J]. Chin Opt Lett, 2006, 4(10): 601-604.

[10] W Wang. Clover Design Lateral Effect Position-Sensitive Device: US, 4887140[P]. 1989-12-12.

[11] Feng Longling, Deng Renliang. Study on optical tracking with four-quadrant photodetector[J]. Infrared and Laser Engineering, 1996, 25(1): 16-21.

[12] 马晓燠, 母杰, 饶长辉. 死区对四象限跟踪传感器跟踪精度的影响[J]. 物理学报, 2012, 61(7): 072903.

Ma Xiaoyu, Mu Jie, Rao Changhui. Error analysis of four-quadrant-based tracking sensor when dead zone is inevitable[J]. Acta Physica Sinica, 2012, 61(7): 072903.

[13] 陈冬严, 林斌, 陈钰清. 位置敏感探测器(PSD)的研究进展[J]. 光学仪器, 2004, 26(4): 68-71.

Chen Dongyan, Lin Bin, Chen Yuqing. Development and progressing of position sensitive detector[J]. Optical Instruments, 2004, 26(4): 68-71.

[14] 丁小昆, 刘铁根, 宋殿友. 激光光斑质量对基于PSD的激光三角法长时间连续测量精度的影响[J]. 中国激光, 2012, 39(2): 0208006.

Ding Xiaokun, Liu Tiegen, Song Dianyou. Impact of accuracy of laser spot quality in laser triangulation long-term continuous measuring based on PSD[J]. Chinese J Lasers, 2012, 39(2): 0208006.

[15] 周雅, 晏磊. 数字图像传感器与照相机技术——信息记录材料在成像领域的技术进展（五）[J]. 信息记录材料, 2002, 3(3): 43-47.

Zhou Ya, Yan Lei. CMOS image sensor and its application in camera technique-technical achievements of information recording materials in imaging fields(5)[J]. Information Rerecording Materials, 2002, 3(3): 43-47

[16] W E Jennings, R G Chan, J L Wong. Computer System with Cascaded Peripheral Component Interconnect (PCI) buses: US, 5632021[P]. 1997-5-20.

[17] G Smith. FPGAs 101: Everything You Need to Know to Get Started[M]. London: Newnes, 2010.

[18] Z Navabi. VHDL: Analysis and Modeling of Digital Systems[M]. New York: Mcgraw-Hill College, 1997.

[19] K J strm, T Hgglund. Advanced PID Control[M]. London: The Instrumentation, Systems, and Automation Society, 2006.

[20] 赵维谦, 谭久彬, 邱丽荣, 等. 激光光束特定方向准直方法与技术[J]. 光电子·激光, 2004, 15(1): 61-64.

Zhao Weiqian, Tan Jiubin, Qiu Lirong, et al.. Laser beam collimation method and technology in given beam direction[J]. J Optoelectronics·Laser, 2004, 15(1): 61-64.

[21] J Uchikoshi, S Shimada, N Ikawa, et al.. Straightness measurement using laser beam straight datum[C]. SPIE, 1995, 2576: 315-322.

[22] Liu Daizhong, Xu Renfang, Fan Dianyuan. Design and performance of a video-based laser beam automatic alignment system[J]. Chin Opt Lett, 2004, 2(2): 92-94.

[23] 虢仲平, 胡倩, 高炳宁, 等. 计算机光路自动准直控制系统的控制问题研究与分析[J]. 计算机测量与控制, 2002, 10(7): 456-458.

Guo Zhongping, Hu Qian, Gao Bingning, et al.. Automatic alignment for optical route control system by computer[J]. Computer Measurement & Control, 2002, 10(7): 456-458.

[24] 虢仲平, 胡倩, 高炳宁. 光路自动准直计算机控制系统[J]. 计算机工程与应用, 2003, 39(8): 208-210.

Guo Zhongping, Hu Qian, Gao Bingning. The automatic alignment system for optical route by computer[J]. Computer Measurement & Control, 2003, 39(8): 208-210.

李耀, 王丁, 郭晓杨, 冷雨欣. 基于CMOS传感器的高速高精度激光光束自动准直系统[J]. 中国激光, 2013, 40(9): 0916002. Li Yao, Wang Ding, Guo Xiaoyang, Leng Yuxin. Fast and Accurate Laser Beam Automatic Alignment System Based on CMOS Sensor[J]. Chinese Journal of Lasers, 2013, 40(9): 0916002.

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