红外与毫米波学报, 2014, 33 (1): 50, 网络出版: 2014-03-14
一种具有高填充因子吸收层和低失调低噪声读出电路的红外探测系统
Infrared detectors with high fill-factor absorber and low offset low noise readout circuit
摘要
使用红外探测器及读出电路, 研制成功非制冷红外探测系统.探测器用二极管作为温度传感器, 使其与集成电路工艺相兼容.采用了新的器件结构, 使得填充因子从20%提高到80%.器件的微机械结构面积为35μm×35μm.读出电路的失调电压为3μV.探测器的输出噪声为2μV.探测器的电压响应率为7894.7V/W, 黑体探测率D*为1.56×109cmHz1/2/W, 噪声等效温差为330mK, 响应时间为27 ms.
Abstract
By using infrared detector and readout circuit, an uncooled infrared detecting system was developed. The detector using diode as the temperature sensor is compatible with integrated circuit process. A new device structure was used to improve the fill-factor from 20% to 80%. The area of micromachined structure is 35μm×35μm. The offset voltage of the readout circuit is 3μV. The output noise of the detector is 2μV. The responsivity of the detector is 7894.7V/W, specific detectivity of the detector is 1.56×109cmHz1/2/W, noise equivalent temperature difference of the detector is 330mK, and response time of the detector is 27 ms.
黄卓磊, 王玮冰, 蒋文静, 欧文, 明安杰, 刘战锋, 陈大鹏. 一种具有高填充因子吸收层和低失调低噪声读出电路的红外探测系统[J]. 红外与毫米波学报, 2014, 33(1): 50. HUANG Zhuo-Lei, WANG Wei-Bing, JIANG Wen-Jing, OU Wen, MING An-Jie, LIU Zhan-Feng, CHEN Da-Peng. Infrared detectors with high fill-factor absorber and low offset low noise readout circuit[J]. Journal of Infrared and Millimeter Waves, 2014, 33(1): 50.
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