中国激光, 1982, 9 (8): 537, 网络出版: 2012-08-23
测量Ti扩散LiNbO3沟道光波导的侧扩散系数
Measurement of lateral diffusion coefficient for Ti: LiNbO3 channel waveguide
摘要
本文用扫描电镜电子探针测量了Y切平行于X方向的9微米宽Ti扩散LiNbO3沟道在Z方向上Ti离子的分布。计算了侧扩散系数,并观察到用稀HF酸（体积比（?）1:200）处理样品（浸泡,擦洗）前后的沟道表面隆起。
Abstract
Scanning electron microscope has been used to observe Ti diffusion parallel to Z direction of the sample surface out of a narrow strip which corresponds to 9 m wide channel waveguide on Y cut LiNbO3 substrate. From these measurements lateral diffusion coefficient was calculated and the swelling of channel at the surface was also observed.
参考文献
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张志舜, 姜锦秀, 张迪扬, 王淑荣. 测量Ti扩散LiNbO3沟道光波导的侧扩散系数[J]. 中国激光, 1982, 9(8): 537. Zhang Zhishun, Jiang Jinxiu, Zhang Diyang, Wang Shurong. Measurement of lateral diffusion coefficient for Ti: LiNbO3 channel waveguide[J]. Chinese Journal of Lasers, 1982, 9(8): 537.
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