光纤激光精密位移调整技术实验研究

为了将激光弯曲成形技术应用于精密位移调整领域实现亚微米精度的位移调整，自行设计和搭建了激光微位移调整与测量平台，将光纤激光通过线性透镜和扫描振镜聚焦在不锈钢薄板上作匀速扫描运动，实时监测加工过程样件自由端的输出位移。建立了样件激光微位移调整模型，在此基础上研究改变激光功率、扫描速度、光束照射位置以及离焦量等参数对调整位移的影响。结果表明，样件通过该平台实现了亚微米级重复精度的精密位移调整，改变激光照射位置是精确改变调整位移的首选；通过优化工艺参数，降低了激光加工过程中样件表面的损伤。

Abstract

In order to achieve a sub-micron scale displacement adjustment in the field of precision adjustment using the laser bending technology, a laser micro displacement adjustment and measuring platform is built. A fiber laser is focused on the metal sample using f- θ lens and moves at constant velocity in a line direction through a galvanometer. The output displacement of the sample′ s free end is measured in real time. A simple closed- form model of laser micro displacement adjustment is established. The effect of laser power, scanning velocity, defocus distance and position of laser irritating on the output displacement is investigated. The experimental results show that an adjustment displacement with submicron scale repeatability on the metal plate sample can be realized in this platform and the best choice to achieve precision adjustment is to adjust the position of laser irritating. An adjustment with little damage to the sample surface is achieved through optimizing the process parameters.

参考文献

[1] Litao Qi, Yoshiharu Namba. Precision laser adjustment using CW diode laser[J]. Precision Engineering, 2011, 35(1): 126-132.

[2] Vollertsen F. Mechanisms and model for laser forming[C]. Proceeding of the Laser Assisted Net Shape Engineering, 1994, 345-359.

[3] 杨冰冰, 王续跃, 徐文骥, 等. 不锈钢碳钢层合板激光弯曲试验研究[J]. 激光与光电子学进展, 2012, 49(9): 091403.

Yang Bingbing, Wang Xuyue, Xu Wenji, et al.. Experiments on laser bending of stainless steel- carbon steel laminated sheet[J]. Laser & Optoelectronics Progress, 2012, 49(9): 091403.

[4] 丁磊, 刘会霞, 王鹤军, 等. 铝锂合金薄板半导体激光弯曲成形试验研究[J]. 中国激光, 2010, 37(8): 2143-2148.

Ding Lei, Liu Huixia, Wang Hejun, et al.. Experimental study of thin aluminum-lithium alloy sheet metal laser forming with semiconductor laser[J]. Chinese J Lasers, 2010, 37(8): 2143-2148.

[5] Yau C L, Chan K C, Lee W B. A new analytical model for laser bending[J]. Laser Assisted Net Shape Engineering, 1997, 2: 357-366.

[6] 蔡友贵, 王秀凤, 陈光南, 等. 板料激光弯曲试验[J]. 北京航空航天大学学报, 2009, 35(2): 154-157.

Cai Yougui, Wang Xiufeng, Chen Guangnan, et al.. Experiment of sheet metal on laser bending[J]. Journal of Beijing University of Aeronautics and Astronautics, 2009, 35(2): 154-157.

[7] 刘杰, 孙胜, 管延锦. 微尺度激光弯曲成形数值模拟与实验研究[J]. 中国激光, 2008, 35(2): 276-280.

Liu Jie, Sun Sheng, Guan Yanjin. Numerical and experimental study on the laser micro- bending process[J]. Chinese J Lasers, 2008, 35(2): 276-280.

[8] Chen G, Xu X, Poon CC, et al.. Experimental and numerical studies on microscale bending of stainless steel with pulsed laser[J]. Journal of Applied Mechanics, 1999, 66(3): 772-779.

[9] Otsu M, Osakada K, Fujii M. Controlled laser forming of sheet metal with shape measurement and using data-base[C]. Proceedings of 8th International Conference on Metal Forming, 2000. 433-438.

[10] 沈洪. 激光弯曲成形的精度控制研究[D]. 上海: 上海交通大学, 2007. 2-3.

Shen Hong. Study on Shape Forming in Laser Forming[D]. Shanghai: Shanghai Jiaotong University, 2007. 2-3.

[11] Xianfan Xu. Laser-based micro scale bending for microelectronics fabrication[C]. SPIE, 2000, 3933: 299-308.

[12] 裴继斌, 张立文, 张全忠, 等. 船舶钢板激光弯曲成形的实验研究[J]. 锻压技术, 2005, 30(5): 64-66.

Pei Jibin, Zhang Liwen, Zhang Quanzhong, et al.. Experimental study on laser bending of ship building steel plate[J]. Forging & Stamping Technology, 2005, 30(5): 64-66.

[13] 管延锦, 季忠, 孙胜, 等. 激光诱发的热应力成形技术及其应用[J]. 航空制造技术, 1999, (4): 30-35.

Guan Yanjin, Ji Zhong, Sun Sheng, et al.. Technology and application of forming caused by laser- induced thermal stresses[J]. Aeronautical Manufacturing Technology, 1999, (4): 30-35.

[14] 石永山. 国外光纤激光器研究进展[J]. 光电技术应用, 2009, 28(6): 1-5.

Shi Yongshan. Development progress of foreign fiber laser[J]. Electro-Optic Technology Application, 2009, 28(6): 1-5.

[15] 高爱梅, 韩微微, 赵志伟. 激光划切机的光束传递系统设计[J]. 电子工业专用设备, 2011, 193: 16-19.

Gao Aimei, Han Weiwei, Zhao Zhiwei. Beam delivery system design of laser dicing equipment[J]. Equipment for Electronic Products Manufacturing, 2011, 193: 16-19.

王东平, 吴志会, 倪明阳, 李显凌. 光纤激光精密位移调整技术实验研究[J]. 激光与光电子学进展, 2014, 51(9): 091201. Wang Dongping, Wu Zhihui, Ni Mingyang, Li Xianling. Experimental Studies on Precision Laser Displacement Adjustment using Fiber Laser[J]. Laser & Optoelectronics Progress, 2014, 51(9): 091201.

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