光学仪器, 2011, 33 (3): 71, 网络出版: 2012-12-06
基于像散原理的并行共聚焦探测曲线灵敏度研究
Study on the sensitivity of detection-curve in a parallel confocal system based on the astigmatic method
摘要
为了高效、快速的实现微结构三维可视化,对基于像散原理并行共聚焦光学系统中探测曲线过零点灵敏度的影响因素进行了研究。从几何光学的角度,建立探测曲线过零点的灵敏度与柱面镜组参数之间的关系,然后利用Zemax对结论进行仿真,其结果提供了获得最佳柱面镜参数及其设计方法。同时,为了进一步提高探测曲线灵敏度,对已有的四象限法进行改进,提出了去对角四象限法,并在MatLab中对两种方法做了比较,其仿真结果证明去对角四象限法可以有效地提高探测曲线过零点的灵敏度。
Abstract
In order to realize an effective and quick 3D visualization of microstructure, the influencing factors of the zero-crossing point sensitivity of the detection-curve in a parallel confocal system by the astigmatic method are mainly studied. By geometrical optics, the realtionship between the zero-crossing point sensitivity of the detection-curve and astigmatism cylindrical lens has been derived, which is simulated by the software of Zemax. The experimental results provide the way of finding optimum parameter between cylindrical lens. At the same time, in order to raise the detection-curve sensitivity, the classical four quadrant method has been improved, and a new four quadrant method with all diagonal elements equal to zero has been finally proposed. Through a lot of comparative tests of the two methods in MatLab, it has been proved that the new method can efficiently improve the zero-crossing point sensitivity of the detection-curve.
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范慧敏, 刘文文. 基于像散原理的并行共聚焦探测曲线灵敏度研究[J]. 光学仪器, 2011, 33(3): 71. FAN Huimin, LIU Wenwen. Study on the sensitivity of detection-curve in a parallel confocal system based on the astigmatic method[J]. Optical Instruments, 2011, 33(3): 71.
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