凸非球面背向零位补偿检验的设计方法

为了实现大口径凸非球面的高准确度检测, 提出了凸非球面背向零位补偿检验方法.该方法在非球面背面引入辅助球面并在光路中加入球面补偿透镜来达到零位补偿检验.辅助球面既可以使凸非球面等效为凹非球面, 还可以补偿部分非球面法线像差.依据三级像差理论, 对辅助球面曲率半径及补偿透镜结构参量进行初始结构求解, 并编写了求解初始结构软件, 再利用光学设计软件对初始结构进行优化, 优化结果满足设计要求, 使凸非球面背向零位补偿检验理论化.在实际应用中, 以Φ120 mm凸非球面为例设计了凸非球面背向零位补偿检测系统, 检测系统设计的剩余波像差PV为0.024λ、RMS为0.007λ.利用此检测方法加工完成后的凸非球面的面形准确度优于λ／40.

Abstract

In order to measure a convex aspherical surface with large aperture, back null compensator test method was proposed. By introducing an auxiliary spherical surface at the back of convex aspherical surface and introducing spherical compensator in optic system, this novel test method is able to realize null test. The auxiliary spherical surface is not only essential to form an aspherical lens with convex aspherical surface, but also can compensate part of normal aberration of convex aspherical surface. Based on the third-order aberration theory, the radii of auxiliary spherical surface and optical parameter of compensator of initial system are calculated. By using commercial optical design soft the initial system is optimized and back null compensator is designed. An aspherical surface with 120 mm diameter is tested to prove the practicability of this method. As the result, the residual wavefront error is smaller than 0.007λ rms (PV 0.024λ). The precision of convex aspherical surface which is measured by this method is better than 1/40λ.

参考文献

[1] 王孝坤,郑立功,张学军,等.子孔径拼接干涉检测离轴非球面的研究［J］.光子学报, 2011, 40(1): 92-97.

WANG Xiao-kun, ZHENG Li-gong, ZHANG Xue-jun, et al. Testing an off-axis asphere by subaperture stitching interferometry［J］. Acta Photonica Sinica, 2011, 40(1): 92-97.

[2] 王孝坤.激光跟踪仪检验非球面面形的方法［J］.光子学报,2012,41(4): 379-383.

WANG Xiao-kun. Measurement of aspherical surface by laser tracker［J］. Acta Photonica Sinica, 2012, 41(4): 379-383.

[3] 陈钦芳, 李英才, 马臻,等.离轴非球面反射镜补偿检验的计算机辅助装调技术研究［J］.光子学报,2010,39(12): 2220-2223.

CHEN Qin-fang, LI Ying-cai, MA Zhen, et al. Computer-aided alignment of off-axis aspheric mirrors in null testing［J］. Acta Photonica Sinica, 2010, 39(12): 2220-2223.

[4] 陈伟, 薛闯.用于成像光谱仪的宽视场离轴三反望远镜设计［J］.光子学报, 2013, 42(8): 950-955.

CHEN Wei, XUE Chuang. Design of wide field of view off-axis three-mirror telescopefor imaging spectrometer［J］. Acta Photonica Sinica, 2013, 42(8): 950-955.

[5] 李均盛, 范琦, 莫卫东,等.用于非球面点衍射检测的最佳匹配球参量获取方法研究［J］.光子学报, 2011,40(12): 1865-1869.

LI Jun-sheng, FAN Qi, MO Wei-dong, et al. A method for getting the best fitting spheric surface parameters for aspheric surface point diffraction measurement［J］. Acta Photonica Sinica, 2011, 40(12): 1865-1869.

[6] 郝沛明,付联效,袁立银,等.反射镜补偿检验［J］.光学学报,2006,26(6): 831-835.

HAO Pei-ming, FU Lian-xiao, YUAN Li-yin, et al. Compensating test of the reflective mirror［J］. Acta Photonica Sinica, 2006, 26(6): 831-835.

[7] 潘君骅.光学非球面的设计加工与检验［M］.苏州: 苏州大学出版社,2004,51-61.

[8] MALACARA Daniel.Optical shop testing［M］.Wiley-Interscience,2007: 122-134,435-445.

[9] 潘俊鹤,胡明勇,沈世东,等.有限距离的凸非球面的透镜补偿检测方法［J］.光学技术,2010,36(3): 420-423.

PAN Jun-he, HU Ming-yong, SHEN Shi-dong, et al. The method of convex aspheric surface using lens for compensation tests with the beam incidence at a distance［J］. Optical Technique, 2010, 36(3): 420-423.

[10] 陶春,潘君骅,胡明勇.一种凸非球面透镜补偿检测的新方法［J］.光学技术,2009,3(51): 123-126.

TAO Chun, PAN Jun-hua, HU Ming-yong. A new method of convex aspheric surface compensation tests［J］. Optical Technique, 2009, 3(51): 123-126.

[11] 付联效,吴永刚,郝沛明,等.透镜补偿检验的研究与分析［J］.光子学报,2007,36(11): 2057-2061.

FU Lian-xiao, WU Yong-gang, HAO Peiming, et al. The study and analysis of lens compensation［J］. Acta Photonica Sinica, 2007, 36(11): 2057-2061.

[12] 马杰, 朱政.改进的Hindle方法检测凸非球面的研究［J］.红外与激光工程,2011,40(2): 277-281.

MA Jie, ZHU Zheng. Testing convex asperical surface with optimized modified hindle arrangement［J］. Intrared and Laser Engineering, 2011, 40(2): 277-281.

[13] 陈旭,刘伟奇.Offner补偿器的结构设计与装调［J］.光学精密工程,2010,8(1): 88-93.

CHEN Xun, LIU Wei-qi. Design and tolerance analysis of offner compensator［J］. Optics and Preciaion Engineering, 2010, 8(1): 88-93.

[14] 陈钦芳,马臻, 赵蒙,等. 双胶合透镜法检测大相对孔径凸非球面透镜［J］.光子学报,2014,43(3): 1-5.

CHEN Qin-fang, MA Zhen, ZHAO Meng, et al. Testing of large relative aperture lens with doublets［J］. Acta Photonica Sinica, 2014, 43(3): 1-5.

[15] 宋强,杨宝喜,袁乔,等.大口径凸非球面面形检测方法研究［J］.中国激光,2014,41(4): 1-5.

SONG Qiang, YANG Bao-xi, YUAN Qiao, et al. Study on large convex aspherical lens testing［J］. Chinese Journal of Lasers, 2014, 41(4): 1-5.

叶璐, 张金平, 郑列华, 郝沛明. 凸非球面背向零位补偿检验的设计方法[J]. 光子学报, 2015, 44(4): 0422002. YE Lu, ZHANG Jin-ping, ZHENG Lie-hua, HAO Pei-min. Design of Back Null Compensator Test Method of Convex Aspherical Surface[J]. ACTA PHOTONICA SINICA, 2015, 44(4): 0422002.

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