光学学报, 2010, 30 (10): 2947, 网络出版: 2012-10-24   

用117 μm合成波长实现绝对距离干涉测量

Absolute Distance Measurement by Using 117 μm Synthetic Wavelength
作者单位
国防科学技术大学光电学院光电工程系, 湖南 长沙 410073
摘要
根据以前双纵模绝对距离测量中合成波长过大导致误差较大的缺点,设计了一种新型多波长绝对距离干涉测量系统。采用633 nm双纵模He-Ne激光器中的一个纵模和629 nm波长的He-Ne激光组成117 μm合成波长,使用双外差干涉技术对距离改变进行精密测量。静态稳定度和动态测量实验表明,由于采用了较小的合成波长,系统的测量不确定度可以达到3.8×10-6L+57 nm,在 500 mm的距离上不确定度小于2 μm。最后从合成波长不确定性的角度,对干涉系统中的误差作了分析。该系统如能与双纵模拍波测量作衔接则可实现对被测距离由粗至精的测量。
Abstract
To overcome the defects of large error in two-longitudinal-mode wavelengths interferometer for absolute distance measurement, a new kind of multi-wavelength absolute distance interferometer is introduced. A double-mode 633 nm He-Ne laser and a 629 nm He-Ne laser are employed to generate 117 μm synthetic wavelength, with which distance with high precision is measured by using the double heterodyne interferometric technique. The static and dynamic experiments show that due to the shorter synthetic wavelength, the uncertainty can reaches 3.8×10-6L+57 nm and the error is 2 μm within 500 mm. From the uncertainty of synthetic wavelength, the error of the new interferometer is also discussed. The interferometer could measure distance with high precision if coupled with two-longitudinal-mode beat measurement system.
参考文献

[1] 金国藩, 李景镇. 激光测量学[M]. 北京:科学出版社, 1998

    Jin Guofan, Li Jingzhen. Laser Metrology[M]. Beijing: Science Press, 1998

[2] 殷纯永. 现代干涉测量技术[M]. 天津:天津大学出版社,1999. 194~230

    Yin Chunyong. Modern Interferometric Measuring Technique[M]. Tianjing: Tianjin University Press,1999. 194~230

[3] 所睿, 范志军, 李岩 等. 双频激光干涉仪技术现状与发展[J]. 激光与红外, 2004, 34(4): 251~253

    Suo Rui, Fan Zhijun, Li Yan et al.. Dual-frequency laser interferometer present state and development[J]. Laser & Infrared, 2004, 34(4): 251~253

[4] 赵洋, 周挺, 李达成 等. 双波长绝对距离外差干涉仪的研究[J]. 光学学报, 1999, 19(4): 1274~1278

    Zhao Yang, Zhou Ting, Li Dacheng et al.. Study on a dual-wavelength absolute distance heterodyne interferometer[J]. Acta Optica Sinica, 1999, 19(4): 1274~1278

[5] 梁晶, 龙兴武, 张斌. 一种新型多波长绝对距离干涉测量系统的研究[J]. 光学技术, 2008, 34(5): 681~683

    Liang Jing, Long Xingwu, Zhang Bin. Study on a new kind of multi-wavelength absolute distance interferometer[J]. Optical Technique, 2008, 34(5): 681~683

[6] 周肇飞, 张涛, 朱目成 等. 双纵模激光拍频干涉仪的研究[J]. 中国激光, 2005, 32(1): 101~104

    Zhou Zhaofei, Zhang Tao, Zhu Mucheng et al.. Research on the laser beat-wave interferometry [J]. Chinese J. Lasers, 2005, 32(1): 101~104

[7] Charles R. Tilford. Analytical procedure for determining length from fractional fringes[J]. Appl. Opt., 1977, 16(7): 1857~1860

[8] G. Margheri, C. Giunti. Double-wavelength superheterodyne interferometer for absolute ranging with submillimeter resolution: results obtained with a demonstration model by use of rough and reflective targets[J]. Appl. Opt., 36(25): 6211~6216

[9] R.Dandliker, R.thalmann, D.Prongue. Two-wavelength laser interferometry using superheterodyne detection[J]. Opt. Lett., 13(5): 339~341

[10] 张辉, 沈乃徵. 双纵模氦氖激光器的光谱与频率复现性分析[J]. 光谱学与光谱分析, 2005, 25(7): 1009~1012

    Zhang Hui, Shen Naizheng. Studies on the spectrum and frequency repletion of double-mode He-Ne laser with frequency stabilization[J]. Spectroscopy and Spectral Analysis, 2005, 25(7): 1009~1012

[11] 梁晶, 龙兴武. 双纵模He-Ne激光器的拍频稳定度分析[J]. 光学学报, 2009, 29(5): 1301~1304

    Liang Jing, Long Xingwu, Zhang Bin. Stability analysis of beat frequency in double-longitudinal-mode He-Ne laser [J]. Acta Optica Sinica, 2009, 29(5): 1301~1304

[12] 梁晶, 龙兴武, 张斌 等. 一种内置F-P标准具选择He-Ne激光器内谱线的方法[J]. 光学学报, 2009, 29(11): 3108~3113

    Liang Jing, Long Xingwu, Zhang Bin et al.. Spectral selection in He-Ne laser by internal F-P etalon [J]. Acta Optica Sinica, 2009, 29(11): 3108~3113

[13] 高伯龙, 丁金星, 龙兴武 等. 全内腔绿(黄、橙)光He-Ne激光器[J]. 光学学报, 1995, 15(12): 1617~1621

    Gao Bolong, Ding Jinxing, Long Xingwu et al.. Green (yellow, green) He-Ne laser with internal cavity[J]. Acta Optica Sinica, 1995, 15(12): 1617~1621

[14] 龙兴武, 杨开勇, 黄云 等. 全内腔绿光He-Ne激光器[J]. 光学学报, 2005, 25(12): 1639~1643

    Long Xingwu, Yang Kaiyong, Huang Yun et al.. Green He-Ne laser with internal cavity[J]. Acta Optica Sinica, 2005, 25(12): 1639~1643

梁晶, 龙兴武, 张斌, 金世龙. 用117 μm合成波长实现绝对距离干涉测量[J]. 光学学报, 2010, 30(10): 2947. Liang Jing, Long Xingwu, Zhang Bin, Jin Shilong. Absolute Distance Measurement by Using 117 μm Synthetic Wavelength[J]. Acta Optica Sinica, 2010, 30(10): 2947.

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