表面处理对液晶显示阵列基板中黑矩阵残留的影响

张锋; 舒适; 齐永莲; 刘震

doi:doi:10.3788/yjyxs20153006.0915

液晶与显示, 2015, 30 (6): 915, 网络出版: 2016-01-19

表面处理对液晶显示阵列基板中黑矩阵残留的影响

Effect of surface treatment on BM residue in TFT-LCD array substrate

论文大纲

张锋舒适齐永莲刘震

作者单位

京东方科技集团股份有限公司技术研发中心，北京 100176

等离子体处理亲水性接触角黑矩阵 plasma treatment hydrophilicity contact angle black matrix

摘要

主要分析了黑矩阵残留程度与SiNx、SiON、SiOx等基底表面亲水特性的关系，研究了等离子体处理对基底表面亲水特性以及黑矩阵残留的影响。首先，通过原子力显微镜和扫描电子显微镜对黑矩阵在不同基底表面的残留颗粒大小、表面粗糙度进行了测试。然后，使用接触角测试仪对不同基底表面的亲水特性进行了表征，分析了表面亲水特性和黑矩阵残留程度的关系。最后，研究了等离子体处理条件对基底表面亲水特性的影响，提出了采用O2/He等离子体对基底表面进行改性来解决黑矩阵的残留问题。实验结果表明：基底表面的水接触角越小、亲水性越强，黑矩阵在基底表面的残留越少；O2/He等离子体表面处理使基底表面的水接触角从17°降低到3°，增强了基底表面的亲水特性，并且黑矩阵工艺之后基底表面的粗糙度从3.06 nm降低到0.69 nm，消除了黑矩阵的残留。

Abstract

The effect of plasma surface treatment on black matrix (BM) residue and substrate hydrophilicity is investigated in order to improve display performance of TFT-LCD with BM on array (BOA) structure.The size of remained BM particles and surface roughness are characterized by atom force microscope (AFM) and scanning electron microscope (SEM).Water contact angle and hydrophilicity of substrate are measured by the contact angle instrument, which gives the correlation between hydrophilicity and BM residue.Finally, the effect of O2 and He plasma surface treatment on BM residue is investigated.Experimental results indicate that the smaller water contact angle means the better hydrophilic and the less BM residue.After treatment with O2 and He plasma, the water contact angle of substrate is decreased from 17° to 3° and the surface roughness is decreased from 3.06 nm to 0.69 nm after BM process.AFM morphology images show that BM residue is completely eliminated from the substrate.

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张锋, 舒适, 齐永莲, 刘震. 表面处理对液晶显示阵列基板中黑矩阵残留的影响[J]. 液晶与显示, 2015, 30(6): 915. ZHANG Feng, SHU Shi, QI Yong-lian, LIU Zhen. Effect of surface treatment on BM residue in TFT-LCD array substrate[J]. Chinese Journal of Liquid Crystals and Displays, 2015, 30(6): 915.

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