同步移相干涉仪偏振移相量的标定方法

同步移相干涉技术在同一时刻于不同空间位置,采集相互之间具有一定移相步长的干涉图,通过对移相干涉图的瞬态采集,实现动态测量。为了保证空间移相的精度,提出了一种定量标定同步移相空间偏振移相量的方法。在偏振移相式的同步移相干涉装置的基础上,采用了压电陶瓷(PZT)移相以及索累-巴比涅(Soleil-Babinet)补偿器移相两种方案,可得到相邻干涉图之间的相位差以及对应偏振片的方位角偏差,实现定量标定同步移相干涉仪的偏振移相量。实验结果表明,偏振移相阵列的平均方位角偏差均小于1°,能满足同步移相干涉实验对移相精度的要求。

Abstract

Simultaneous phase-shifting technology is used to capture several interferograms with certain phase intervals in different spacial positions at the same time. It can be applied to dynamic measurement because of its simultaneous interferograms-capturing characteristic. In order to guarantee the precision of the spacial phase-shifting,a method for calibrating the phase-shifting values of the polarizer array is proposed to fulfill the need. Based on the simultaneous phase-shifting interferometer,two methods by use of PZT and Soleil-Babinet compensator are utilized to obtain the phase differences of the neighbouring interferograms and the transmission direction differences of the corresponding polarizers. The experimental results indicate the average transmission direction error of the phase-shifting polarizer array is less than 1°,which can guarantee phase-shifting precision in the simultaneous phase-shifting interferometry.

参考文献

[1] . Smythe,R. Moore. Instantaneous phase measuring interferometry[J]. Opt. Eng., 1984, 23(4): 361-364.

[2] J. E. Millerd,N. J. Brock. Methods and apparatus for splitting,imaging,and measuring wavefronts in interferometry[P]. U. S. Patent PCT/US 2000/027343,2001

[3] J. E. Millerd,N. J. Brock,J. Hayes et al.. Pixelated phase-mask dynamic interferometer[C]. SPIE,2004,5531:304-314

[4] . E. Millerd,Neal Brock et al.. Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer[J]. Appl. Opt., 2005, 44(32): 6861-6868.

[5] N. Brock,J. Hayes,B. Kimbrough et al.. Dynamic interferometry[C]. SPIE,2005,5875:F1-F10

[6] James C. Wyant. Vibration insensitive interferometric optical testing[C]. Frontiers in Optics,2004,OTuB2

[7] . Y. Kwon. Multichannel phase-shifted interferometer[J]. Opt. Lett., 1984, 9(2): 59-61.

[8] J. Kranz,J. Lamprecht,A. Hettwer et al.. Fiber optical single frame speckle interferometer for measuring industrial surface[C]. SPIE,1998,3408:328-331

[9] . Hettwer,J. Kranz,J. Schwider. Three channel phase-shifting interferometer using polarization-optics and a diffraction grating[J]. Opt. Eng., 2000, 39(4): 960-966.

[10] 钱克矛,缪泓,伍小平. 一种用于动态过程测量的实时偏振相移方法[J]. 光学学报,2001,21(1):64-67

Qian Kemao,Miao Hong,Wu Xiaoping. A real-time polarization phase shifting technique for dynamic measurement[J]. Acta Optica Sinica,2001,21(1):64-67

[11] 左芬,陈磊,徐春生. 基于二维光栅分光的同步移相干涉测量技术[J]. 光学学报,2007,27(4):663-667

Zuo Fen,Chen Lei,Xu Chunsheng. Simultaneous phase-shifting interferometry based on two-dimension grating[J]. Acta Optica Sinica,2007,27(4):663-667

[12] 左芬,陈磊,徐晨. 同步移相干涉的测量性能[J]. 中国激光,2007,34(12):1682-1687

Zuo Fen,Chen Lei,Xu Chen. Measurement performance of simultaneous phase-shifting interferometer[J]. Chinese J. Lasers,2007,34(12):1682-1687

尹嘉懿, 徐晨, 苏俊宏, 陈磊. 同步移相干涉仪偏振移相量的标定方法[J]. 中国激光, 2009, 36(s2): 178. Yin Jiayi, Xu Chen, Su Junhong, Chen Lei. Calibration for Phase-Shifting Polarizer Array in the Simultaneous Phase-Shifting Interferometer[J]. Chinese Journal of Lasers, 2009, 36(s2): 178.

同步移相干涉仪偏振移相量的标定方法

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