离子束溅射 Al2O3薄膜及其在蓝宝石窗口中的应用
米高园, 杨崇民, 张建付, 王松林, 刘青龙, 朱筱群, 李明伟. 离子束溅射 Al2O3薄膜及其在蓝宝石窗口中的应用[J]. 红外技术, 2019, 41(10): 902.
MI Gaoyuan, YANG Chongmin, ZHANG Jianfu, WANG Songlin, LIU Qinglong, ZHU Xiaoqun, LI Mingwei. Ion Beam Sputtering Alumina Film and Application in Sapphire Optical Windows[J]. Infrared Technology, 2019, 41(10): 902.
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米高园, 杨崇民, 张建付, 王松林, 刘青龙, 朱筱群, 李明伟. 离子束溅射 Al2O3薄膜及其在蓝宝石窗口中的应用[J]. 红外技术, 2019, 41(10): 902. MI Gaoyuan, YANG Chongmin, ZHANG Jianfu, WANG Songlin, LIU Qinglong, ZHU Xiaoqun, LI Mingwei. Ion Beam Sputtering Alumina Film and Application in Sapphire Optical Windows[J]. Infrared Technology, 2019, 41(10): 902.