光电工程, 2016, 43 (9): 56, 网络出版: 2016-12-09   

凸二次曲面的工艺球面补偿检测

Compensation Testing of Technological Spherical Surface for Convex Quadric Surface
作者单位
1 中国科学院南京天文仪器研制中心,南京 210042
2 中国科学院大学,北京 100049
3 合肥工业大学 光电技术研究院,合肥 230009
摘要
在非球面的检测中,工艺球面补偿检测是最普遍的方法。针对该方法适用范围的局限性,本文提出了应用工艺球面补偿检测时非球面所必须满足的条件。根据波像差理论和瑞利判据,推导出凸二次曲面能够应用工艺球面补偿检测所必须满足的条件,并采用有限距离正面补偿检测的方法,对工艺球面补偿检测的局限性提出了改进。最终结果表明本文所提出的理论能够判定,所需要研制的凸双曲面镜不能直接应用工艺球面补偿检测,而组合补偿检测方法能够保证凸双曲面的面形精度δPV=0.159 8λ 优于λ/6(λ=632.8 nm),满足技术指标。
Abstract
In the testing of aspheric surface, the method of spherical compensation testing is always applied widely. Referring to the limitation of this method, the conditions are put forward which the aspheric surface has to meet. According to aberration theory and Rayleigh criterion, we could get the principles of applying the spherical compensation testing method to test convex quadric surface. And according to the compensation tests with the beam incidence at a distance, we can improve the method of spherical compensation testing. After accomplishing the manufacture of convex quadric surface mirror, the finial consequence shows that the theory and practices in this article can determine that spherical compensation testing can not be used to the test of this convex hyperboloidal surface mirror and δPV of the surface is 0.158 9λ which is better than λ/6 (λ=632.8 nm) under the use of combined compensation testing.
参考文献

[1] 师途,杨甬英. 非球面光学元件的面形检测技术 [J]. 中国激光,2014,7(1):26-46.

    SHI Tu,YANG Yongying. Surface testing methods of aspheric optical elements [J]. Chinese Journal of Lasers,2014,7(1): 26-46.

[2] 张钧,董军,张艳,等. 数字刀口检测技术 [J]. 光电工程,2005,32(5):65-68.

    ZHANG Jun,DONG Jun,ZHANG Yan,et al. Study on digital knife-edge test [J]. Opto-Electronic Engineering,2005, 32(5):65-68.

[3] 潘俊骅. 光学非球面的设计、加工与检验 [M]. 苏州:苏州大学出版社,2004:51.

    PAN Junhua. Design,fabrication and testing of aspherical optical surface [M]. Suzhou:Soochow University Press,2004: 51.

[4] 高松涛,隋永新,杨怀江. 用计算全息图对非球面的高精度检测与误差评估 [J]. 光学学报,2013,33(6):0612003.

    GAO Songtao,SUI Yongxin,YANG Huaijiang. High precise testing of aspheric with computer-generated hologram and error evaluation [J]. Acta Optica Sinica,2013,33(6):0612003.

[5] 宋强,杨宝喜. 大口径凸非球面面形检测方法研究 [J]. 中国激光,2014,41(4):0408003.

    SONG Qiang,YANG Baoxi. Study on large covex aspherical lens testing [J]. Chinese Journal of Lasers,2014,41(4): 0408003.

[6] 王孝坤. 利用子孔径拼接法测量大口径凸面反射镜 [J]. 应用光学,2013,34(1):95-100.

    WANG Xiaokun. Large convex mirror measurement by subaperture stitching interferometry [J]. Applied Optics,2013,34(1): 95-100.

[7] 陈旭,刘伟奇,康玉思,等. Offner 补偿器的结构设计与装调 [J]. 光学 精密工程,2010,18(1):88-93.

    CHEN Xu,LIU Weiqi,KANG Yusi,et al. Design and tolerance analysis of offner compensator [J]. Optics and Presision Engineering,2010,18(1):88-93.

[8] 张以谟. 应用光学:三版 [M]. 北京:电子工业出版社,2008:344-348.

    ZHANG Yimo. Applied Optics:3nd Edition [M]. Beijing:Electronics Industry Press,2008:344-348.

[9] 袁旭沧. 现代光学设计方法 [M]. 北京:北京科学技术出版社,1995:79-81.

    YUAN Xucang. Optical Design [M]. Beijing:Beijing Science and Technology Press,1995:79-81.

陈泽, 胡明勇, 赵奇, 范二荣. 凸二次曲面的工艺球面补偿检测[J]. 光电工程, 2016, 43(9): 56. CHEN Ze, HU Mingyong, ZHAO Qi, FAN Errong. Compensation Testing of Technological Spherical Surface for Convex Quadric Surface[J]. Opto-Electronic Engineering, 2016, 43(9): 56.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!