变斑变焦激光切割光学系统的设计 
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Design of Variable Spot and Zoom Optical System for Laser Cutting
1 华中科技大学光学与电子信息学院激光加工国家工程研究中心, 湖北 武汉 430074
2 深圳华中科技大学研究院, 广东 深圳 518057
图 & 表
图 1. 两镜组激光切割系统
Fig. 1. Laser cutting system with two lens
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图 2. 变焦扩束系统
Fig. 2. Zoom beam expander system
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图 3. 五镜组激光变斑变焦系统
Fig. 3. Variable spot and zoom laser system with five lens
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图 4. 四镜组激光变斑变焦系统
Fig. 4. Variable spot and zoom laser system with four lens
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图 5. 扩束系统的原理
Fig. 5. Principle of beam expander system
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图 6. 变焦镜组和补偿镜组在光轴上的运动轨迹
Fig. 6. Geometric locus of zoom group and compensated group
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图 7. MATLAB软件仿真结果
Fig. 7. Simulation results with MATLAB software
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图 8. 焦斑处细节放大图
Fig. 8. Amplification diagram of focal spot
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图 9. 焦点移动距离随补偿镜组移动距离的变化
Fig. 9. Change of focal movement distance with the movement distance of compensated group
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图 10. 不同放大倍率时的光学系统、聚焦面光斑与波像差
Fig. 10. Optical system, focusing surface spot, and wavefront aberration with different magnifications
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表 1变焦镜组移动时各项数据的变化
Table1. Change of all items when zoom group is moved
| d1 | d2 | f'12 | M |
|---|
| 0<d1<f'1+f'2,d1↑ | d2<f'3,d2↓ | f'12<0, |f'12|↑ | ↓ | | f'1+<d1<f'1,d1↑ | d2>f'3,d2↓ | f'12>0,|f'12|↓ | ↑ | | d1=f'1 | d2=f'3 | f'12=f'1 | M=|f'3/f'1| | | f'1+f'2-d1<f'2 ,d1↑ | d2<f'3,d2↓ | f'12>0 ,|f'12|↓ | ↑ |
|
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表 2不同放大倍率时d1和d2的值
Table2. Values of d1 and d2 with different magnifications
| M | k | d1 /mm | d2 /mm |
|---|
| 0.4 | 3.750 | 64.53 | 17.00 | | 0.6 | 2.500 | 60.80 | 52.00 | | 0.8 | 1.875 | 57.07 | 69.00 | | 1.0 | 1.500 | 53.33 | 80.07 | | 1.2 | 1.250 | 49.60 | 87.00 | | 1.4 | 1.070 | 45.87 | 92.00 | | 1.5 | 1.000 | 44.00 | 94.00 |
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表 3不同放大倍率时变焦镜组和补偿镜组的坐标位置
Table3. Coordinate positions of zoom group and compensated group with different magnifications
| M | k | Coordinate position /mm |
|---|
| Zoom group | Compensated group |
|---|
| 0.4 | 3.750 | 164.53 | 181.53 | | 0.6 | 2.500 | 160.80 | 212.80 | | 0.8 | 1.875 | 157.07 | 226.07 | | 1.0 | 1.500 | 153.33 | 233.40 | | 1.2 | 1.250 | 149.60 | 236.60 | | 1.4 | 1.070 | 145.87 | 237.87 | | 1.5 | 1.000 | 144.00 | 238.00 |
|
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表 4利用Zemax软件设计的固定镜组的参数
Table4. Parameters of fixed group calculated by Zemax software
| Item | Surface type | Radius /mm | Thickness /mm | Glass material | Conic coefficient |
|---|
| OBJ | Standard | Infinity | Infinity | | 0 | | STO | Standard | 107.35 | 3.00 | Silica | 0 | | 2 | Standard | -85.81 | 1.00 | | 0 | | 3 | Standard | 39.17 | 3.00 | Silica | -0.94 | | 4 | Standard | 518.98 | 47.33 | | 0 | | IMA | Standard | Infinity | | | 0 |
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表 5利用Zemax软件设计的变焦镜组的参数
Table5. Parameters of zoom group calculated by Zemax magnification
| Item | Surface type | Radius /mm | Thickness /mm | Glass material | Conic coefficient |
|---|
| OBJ | Standard | Infinity | Infinity | | 0 | | STO | Standard | 2.94×107 | 2.00 | Silica | 0 | | 2 | Standard | 13.04 | -29.00 | | -2.10 | | IMA | Standard | Infinity | | | 0 |
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表 6利用Zemax软件设计的补偿镜组和聚焦透镜的参数
Table6. Parameters of compensated group and focusing lens calculated by Zemax magnification
| Item | Surface type | Radius /mm | Thickness /mm | Glass material | Conic coefficient |
|---|
| OBJ | Standard | Infinity | Infinity | | 0 | | STO | Standard | 98.94 | 5 | Silica | 0 | | 2 | Standard | 58.34 | 2 | | 1.86 | | 3 | Standard | 38.68 | 5 | Silica | 0 | | 4 | Standard | 240.66 | 144 | | 0 | | IMA | Standard | Infinity | | | 0 |
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表 7优化后的系统结构参数
Table7. Parameters of system after optimization
| Item | Surface type | Radius /mm | Thickness /mm | Glass material | Conic coefficient |
|---|
| OBJ | Standard | Infinity | Infinity | | 0 | | STO | Standard | 107.35 | 3.00 | Silica | 0 | | 2 | Standard | -85.81 | 1.00 | | 0 | | 3 | Standard | 39.17 | 3.00 | Silica | -0.94 | | 4 | Standard | 518.98 | 39.38 | | 0 | | 5 | Standard | -45.68 | 2.00 | Silica | -22.44 | | 6 | Standard | 17.43 | 87.12 | | 0 | | 7 | Standard | 703.05 | 5.00 | Silica | 0 | | 8 | Standard | 95.62 | 2.00 | | 0 | | 9 | Standard | 76.59 | 5.00 | Silica | 0 | | 10 | Standard | -94.75 | 25.00 | | 0 | | 11 | Standard | 98.94 | 5.00 | Silica | 0 | | 12 | Standard | 58.39 | 2.00 | | 1.86 | | 13 | Standard | 38.68 | 5.00 | Silica | 0 | | 14 | Standard | 240.66 | 144.01 | | 0 | | IMA | Standard | Infinity | | | 0 |
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表 8优化后不同放大倍率下计算得到的d1和d2的值
Table8. Values of d1 and d2 calculated at different magnification after optimization
| M | k | d1/mm | d2/mm |
|---|
| 0.4 | 3.750 | 60.27 | 11.17 | | 0.6 | 2.500 | 55.75 | 50.26 | | 0.8 | 1.875 | 50.28 | 70.42 | | 1.0 | 1.500 | 45.34 | 80.07 | | 1.2 | 1.250 | 42.10 | 84.33 | | 1.4 | 1.070 | 40.08 | 86.45 | | 1.5 | 1.000 | 39.38 | 87.12 |
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表 9系统的公差参数
Table9. Tolerance parameters of this system
| Front R /mm | Back R /mm | Thickness /mm | Decenter X /mm | Decenter Y /mm | Tilt X | Tilt Y |
|---|
| ±0.15 | ±0.15 | ±0.15 | ±0.15 | ±0.15 | ±0.1 | ±0.1 |
|
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葛佳琪, 秦应雄, 刘晓东, 唐霞辉. 变斑变焦激光切割光学系统的设计[J]. 光学学报, 2019, 39(2): 0222001. Jiaqi Ge, Yingxiong Qin, Xiaodong Liu, Xiahui Tang. Design of Variable Spot and Zoom Optical System for Laser Cutting[J]. Acta Optica Sinica, 2019, 39(2): 0222001.
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