光子学报, 2014, 43 (1): 0131002, 网络出版: 2021-08-31   

近红外宽截止窄带滤光膜的研制

Design and Fabrication of Near-infrared Narrow-band Filters with Wide Rejection Band
作者单位
长春理工大学 光电工程学院,长春 130022
摘要
在空间光通信系统中,为满足光学系统对滤光膜的特殊要求,研制出了一种近红外宽截止窄带滤光膜,实现了降低深背景范围内杂散光干扰的要求.通过对薄膜材料特性的研究、膜系设计曲线的不断优化,得到了相对易于制备的窄带滤光膜结构;采用电子束加热蒸发及离子辅助沉积技术制备薄膜,采用光控加晶控同时监控的方法监控膜层厚度,通过不断优化工艺参量,提高中心波长处的透过率,最终成功得到了光谱性能较好的滤光膜.经光谱测试表明:所镀膜层在800~1 530 nm、1 600~1 800 nm波段平均透过率低于0.3%,1 565 nm单点透过率高于92%,通带半带宽为18 nm,满足光学系统的使用要求.
Abstract
In order to meet the special requirements for filter coating of the space optical communication system, a narrow-band filter with high rejection in near-infrared band was prepared. The filter can reduce the interference of the stray light perfectly in the range of deep background. Through analyzing the characteristics of the coating materials, continually optimizing the film system design curve, an easily prepared narrow-band filter film structure was obtained. Thin films were prepared through electron beam evaporation method and ion-assisted deposition technique, and the thickness of the filter was controlled using crystal-controlled and light control monitoring methods at the same time. By continually optimizing technical parameters, the transmittance of the central wavelength increased, and the filter membrane with better spectral performance was obtained successfully. After the spectrum testing, the average transmittance of the filter is lower than 0.3% at the band of 800~1 530 nm and 1 600~1 800 nm, the transmittance at 1 565 nm is higher than 92% and the full-width at half maximum of the filter is 18 nm, and the technical requirements of the optical system are satisfied.
参考文献

[1] 付强, 姜会林, 王晓曼,等. 空间激光通信研究现状及发展趋势 [J]. 中国光学, 2012, 5(2):116-125.

    FU Qiang, JIANG Hui-lin, WANG Xiao-man, et al. Research status and development trend of space laser communication[J]. Chinese Optics, 2012, 5(2): 116-125.

[2] 付联效, 吴永刚, 郑秀萍,等. 中心波长121.6 nm的真空紫外窄带滤光片设计和制备[J]. 光学学报,2008, 28(12): 2427-2430.

    FU Lian-xiao, WU Yong-gang, ZHENG Xiu-ping, et al. Design and preparation of narrowband filter with central wavelength 121.6 nm in vacuum ultraviolet region[J]. Acta Optica Sinica, 2008, 28(12): 2427-2430.

[3] 付秀华, 寇洋, 刘冬梅,等.日盲系统紫外诱导滤光片的研制[J]. 中国激光, 2012, 40(5): 0507002.

    FU Xiu-hua, KOU Yang, LIU Dong-mei, et al. Research of ultraviolet induced transmission filter for the solar blind system[J]. Chinese Journal of Lasers, 2013, 40(5): 0507002.

[4] 俞侃, 廖剑锋, 张晓丹,等. 基于遗传算法的斜入射窄带滤光片膜系优化设计[J]. 光子学报, 2013, 42(2): 181-185.

    YU Kan, LIAO Jian-feng, ZHANG Xiao-dan, et al. Optimal design of narrowband filter in oblique incidence based on genetic arithmetic[J].Acta Photonica Sinica, 2013, 42(2): 181-185.

[5] LI Shan, FU Xiu-hua, SU Jia-ni, et al. Fabrication of filter film using in lida ranging system[J]. Infrared and Laser Engineering, 2010, 39(5): 853-856.

[6] 杨永亮, 刘国军, 付秀华,等.激光敌我识别系统中滤光膜的研制[J]. 光学学报, 2012, 32(1): 0131002.

    YANG Yong-liang, LIU Guo-jun, FU Xiu-hua, et al. Study and fabrication of filter film in laser identification between friend or foe system[J]. Acta Optica Sinica, 2012, 32(1): 0131002.

[7] 陈建平, 师建涛, 郭芮,等. 中红外带通滤光片的设计与制备. 应用光学, 2012, 33(3): 595-598.

    CHEN Chao-ping, SHI Jian-tao, GUO Rui, et al. Design and preparation of mid-infrared band-pass filter[J]. Journal of Applied Optics, 2012, 33(3):595-598.

[8] 钟迪生. 真空镀膜—光学材料的选择与应用[M]. 沈阳:辽宁大学出版社, 2001. 235-241, 252-265.

[9] 贾钰超, 李刚, 白玉琢,等. 窄带滤光片设计中通带半宽度、矩形度和陡度的影响因素研究[J]. 红外技术, 2012, 34(8): 448-452.

    JIA Yu-chao, LI Gang, BAI Yu-zhuo, et al. Study of factors influencing half band width rectangularity and steepness in design of narrow bend-pass filter[J]. Infrared Technology, 2012, 34(8): 448-452.

[10] 唐晋发, 顾培夫, 刘旭等. 现代光学薄膜技术[M]. 浙江:浙江大学出版社, 2006: 114-118.

[11] 潘永强, 朱昌, 弥谦, 等.电子束蒸发TiO2薄膜的光学特性[J]. 应用光学, 2004, 25(5):53-55.

    PAN Yong-qiang, ZHU Chang, MI Qian, et al. The optical properties of TiO2 thin film prepared by electron beam evaporation[J].Applied Optics, 2004, 25(5): 53-55.

[12] 蒋晓东, 黄祖鑫, 任寰,等.光学膜层激光预处理过程研究[J].强激光与粒子束, 2002, 14(3):321-324.

    JANG Xiao-dong, HUANG Zu-xin, REN Huan, et al. Study of laser conditioning process for optical film[J]. High Power Laser and Particle Beams, 2001, 14(3): 321-324.

[13] 占美琼, 张东平, 杨健,等. 石英晶体振荡法监控膜厚研究[J].光子学报, 2004, 33(5):585-588.

    ZHAN Mei-qiong, ZHANG Dong-ping, YANG Jian, et al. Thickness monitoring by quartz crystal oscillation for optical coatings[J].Acta Photonica Sinica, 2004, 33(5): 585-588.

[14] 沈弈, 刘冬梅, 付秀华,等. 紫外光通信滤光膜的研制[J]. 中国激光, 2011, 38(12):1207005.

    SHEN Yi, LIU Dong-mei, FU Xiu-hua, et al. Research and preparation of the ultraviolet communication filters[J]. Chinese Journal of Lasers, 2011, 38(12): 1207005.

[15] 付秀华, 孙英杰, 刘冬梅,等.可见与近红外宽带减反膜的研制[J]. 光学学报, 2013, 33(3):0331002.

    FU Xiu-hua, SUN Ying-jie, LIU Dong-mei, et al. Study and fabrication of visible and infrared broadband antireflection coating[J]. Acta Optica Sinica, 2013, 33(3): 0331002.

[16] 王刚, 付秀华, 刘冬梅,等. 可见红外制导系统高通滤光片的研制[J]. 中国激光, 2013, 40(1): 0107001-5.

    FU Xiu-hua, WANG Gang, LIU Dong-mei, et al. Research and preparation of the visible and infrared control and guide system filters[J]. Chinese Journal of Lasers, 2013, 40(1): 0107001-5.

刘冬梅, 王晓娟, 付秀华, 张静, 潘永刚. 近红外宽截止窄带滤光膜的研制[J]. 光子学报, 2014, 43(1): 0131002. LIU Dong-mei, WANG Xiao-juan, FU Xiu-hua, ZHANG Jing, PAN Yong-gang. Design and Fabrication of Near-infrared Narrow-band Filters with Wide Rejection Band[J]. ACTA PHOTONICA SINICA, 2014, 43(1): 0131002.

本文已被 5 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!