不同沉积速率下热蒸发银膜的光学性能和结构分析

实验分别采用5种不同的沉积速率(0.44,0.30,0.18,0.08和0.04 nm/s)制备了金属银薄膜,膜系结构为基底/Al₂O₃/Ag/Al₂O₃/Air。光谱测试结果表明,沉积速率0.18 nm/s的样品具有最高的平均反射率。采用X射线衍射(XRD)仪分析了5个样品的X射线衍射谱。银膜择优取向(111)晶向,0.18 nm/s的样品衍射峰强度最大、衍射峰半峰全宽最小、晶粒尺寸最大,说明此沉积速率下结晶程度最高。过快或者过慢的沉积速率会导致银膜结晶程度下降,从而导致平均消光系数增大和反射率下降。在实验条件下,银膜的最佳沉积速率在0.18 nm/s附近,此时制备的银膜具备最好的结晶程度和最高的反射率,此结论不同于传统意义上认为热蒸发银膜速率越快,成膜质量越高、光谱特性越好的观点。

Abstract

Silver films bedded and covered Al₂O₃ were prepared with five different deposition rates:0.44,0.30,0.18,0.08 and 0.04 nm/s. The reflectance spectra indicated the sample with a deposition rate of 0.18 nm/s had the highest average reflectance. X-ray diffraction (XRD) spectra of the five samples were obtained by XRD,which showed silver (111) was the preferred orientation. The sample with the deposition rate of 0.18 nm/s had the highest intensity of diffraction peak,the narrowest full width at half maximum (FWHM) and the biggest average grain size,which totally meant the sample had a best crystallinity. Samples with faster or slower deposition rate would cause low level crystallinity and resulted in the increase of extinction coefficient and decrease of reflectance. In our experimental conditions,it is suggested the best deposition rate is around 0.18 nm/s,which can lead to the best crystallinity and average reflectance. The result is different from the opinion which originally regarded the quality and reflectance of silver films would be better with faster thermal evaporation deposition rate.

参考文献

[1] 王勤诚,俞国庆. Au/SiO2纳米复合型材料的光吸收性质[J]. 光学学报,2006,26(5):783-786

Wang Qincheng,Yu Guoqing. Optical absorption properties of Au-SiO2 Nanocomposites[J]. Acta Optica Sinica,2006,26(5):783-786

[2] 王伟田,孙玉明,戴振宏等. Au-BaTiO3复合薄膜的脉冲激光沉积制备及其非线性光学效应[J]. 光学学报,2006,26(8):1265-1268

Wang Weitian,Sun Yuming,Dai zhenhong et al.. Third-order optical nonlinearity and preparation of Au-BaTiO3 composite films by pulsed laser deposition [J]. Acta Optica Sinica,2006,26(8):1265-1268

[3] 杨建军,周京利,王克逸等. 掺杂Ag纳米粒子对偶氮聚合物光致异构效应的影响[J]. 光学学报,2007,27(1):119-123

Yang Jianjun,Zhou Jingli,Wang Keyi et al.. Influence of silver-doped nanoparticles on photo-induced isomerization of azo polymer [J]. Acta Optica Sinica,2007,27(1):119-123

[4] 干蜀毅,徐向东,洪义麟等. K9和石英玻璃基片上Au膜真空紫外反射特性研究[J]. 光学学报,2007,27(8):1529-1535

Gan Shuyi,Xu Xiangdong,Hong Yilin et al.. Reflectivity of Au film on K9 and quartz substrate in vacuum ultraviolet [J]. Acta Optica Sinica,2007,27(8):1529-1535

[5] 张锦龙,刘旭,厉以宇等. 基于一维金属介质周期结构的偏振分束[J]. 光学学报,2008,28(9):1788-1792

Zhang Jinlong,Liu Xu,Li Yiyu et al.. Polarization beam splitters based on one-dimensional metal-dielectric structure [J]. Acta Optica Sinica,2008,28(9):1788-1792

[6] 汤晓黎,石艺尉. 介质/金属结构太赫兹空芯光纤的传输特性[J]. 光学学报,2008,28(11):2057-2061

Tang Xiaoli,Shi Yiwei. Transmission characteristics of dielectric-coated metal hollow fiber for terahertz wave [J]. Acta Optica Sinica,2008,28(11):2057-2061

[7] 张晓丽,曾捷,梁大开等. 金属膜层对光纤表面等离子传感器的影响研究[J]. 光学学报,2008,28(s2):373-377

Zhang Xiaoli,Zeng Jie,Liang Dakai et al.. Study on the performance influence of the thickness of the metal film on the optical fiber surface plasma wave resonance sensor [J]. Acta Optica Sinica,2008,28(s2):373-377

[8] . G. Fleming,S. Y. Lin,I. El-Kady et al.. All-metallic three-dimensional photonic crystals with a large infrared bandgap[J]. Nature, 2002, 417(6884): 52-55.

[9] A. M. Piegari,V. Janicki. Metal-dielectric coatings for variable transmission filters with wide rejection bands [C]. SPIE,2004,5250:343-348

[10] Xuanjie Liu,Xun Cai,Jinshuo Qiao et al.. The design of ZnS/Ag/ZnS transparent conductive multilayer films [J]. Thin Solid Films,2003,441(1-2):200-206

[11] . Leftheriotis,P. Yianoulis,D. Patrikios. Deposition and optical properties of optimized ZnS/Ag/ZnS thin films for energy saving applications[J]. Thin Solid Films, 1997, 306(1): 92-99.

[12] . P. Rand,P. Peumans,Stephen R. Forrest. Long-range absorption enhancement in organic tandem thin-film solar cells containing silver nanoclusters[J]. J. Appl. Phys., 2004, 96(12): 7519-7526.

[13] . W. Ebbesen,H. J. Lezec,H. F. Ghaemi et al.. Extraordinary optical transmission through sub-wavelength hole arrays[J]. Nature, 1998, 391(6668): 667-669.

[14] . J. Lezec,A. Degiron,E. Devaux et al.. Beaming light from a subwavelength aperture[J]. Science, 2002, 297(5582): 820-822.

[15] . B. Pendry. Negative refraction makes a perfect lens[J]. Phys. Rev. Lett., 2000, 85(18): 3966-3969.

[16] . Fang,H. Lee,C. Sun et al.. Sub-diffraction-limited optical imaging with a silver superlens[J]. Science, 2005, 308(5721): 534-537.

[17] Sun Xilian,Hong Ruijin,Hou Haihong et al.. Optical properties and structures of silver thin films deposited by magnetron sputtering with different thicknesses [J]. Chin. Opt. Lett.,2006,4(6):366-369

[18] . Ujihara. Reflectivity of metals at high temperatures[J]. J. Appl. Phys., 1972, 43(5): 2376-2383.

[19] . B. Johnson,R. W. Christy. Optical constants of the noble metals[J]. Phys. Rev. B, 1972, 6(12): 4370-4379.

卢宝文, 徐学科, 余祥, 范正修. 不同沉积速率下热蒸发银膜的光学性能和结构分析[J]. 光学学报, 2010, 30(1): 283. Lu Baowen, Xu Xueke, Yu Xiang, Fan Zhengxiu. Optical Properties and Structures of Silver Thin Films Deposited by Thermal Evaporation with Different Deposition Rate[J]. Acta Optica Sinica, 2010, 30(1): 283.

不同沉积速率下热蒸发银膜的光学性能和结构分析

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