流动腐蚀方式对石英光纤湿腐蚀特性的影响

为了获得光滑的腐蚀光纤表面, 本文从光纤腐蚀的传质及动力学特性出发, 设计了一种流动腐蚀光纤装置。采用质量百分比浓度为12.5%的氢氟酸(HF)溶液, 研究了石英光纤的组成成分、腐蚀剂温度和流速对腐蚀速率以及腐蚀后光纤表面形貌的影响。实验结果及理论分析表明: 光纤腐蚀速率和表面粗糙度受化学反应速率和传质速率控制; 由于光纤纤芯与包层成分不同, 导致纤芯腐蚀速率高于包层腐蚀速率; 在静态腐蚀条件下, 腐蚀速率随温度呈非线性增长, 且腐蚀后光纤表面粗糙; 在流动腐蚀条件下, 光纤腐蚀速率提高, 并与温度呈线性关系, 腐蚀后光纤表面粗糙度随流速的增加呈现出先减小后增大的趋势; 在流速为0.75 L/min时, 获得了光滑的腐蚀光纤表面。

Abstract

To obtain a smooth surface of etched-fiber core, a flow etching system was developed based on mass-transfer and dynamic response characteristics in silica optical fiber etching processes. The effects of fiber composition, etchant temperature and flow rate on the etching rate of fibers and the surface morphology of etched-fibers were investigated in the mass percent concentration of Hydrofluoric Acid (HFA) at 12.5%, respectively. The experimental and theoretical studies show that the etching rate and the surface roughness of the etched-fibers are controlled by the chemical reaction rate and mass transfer rate. The etching rate of fiber core is higher than that of fiber cladding because of the compositional difference between the fiber core and fiber cladding. In the static etching condition, the increase of the etching rate is nonlinear with temperature, and the etched-fiber gives a rough surface.Moreover,in the flow etching condition, the etching rate is improved and is linear with temperature, and the roughness of the etched-fiber core increases at first and then decreases with the increase of etchant flow rate. The results also show that the etched-fiber core with smooth surfaces can be repeatedly obtained with the etchant flow rate at 0.75 L/min.

参考文献

[1] GONALVES H M R, DUARTEB A J, ESTEVES da SILVA J C G. Optical fiber sensor for Hg (II) based on carbon dots ［J］. Biosensors and Bioelectronics, 2010, 26: 1302-1306.

[2] PERROTTON C, JAVAHIRALY N, Slaman M, et al.. Fiber optic surface plasmon resonance sensor based on wavelength modulation for hydrogen sensing ［J］. Optics Express, 2011, 19(23): A1175-A1183.

[3] 赵明富,钟年丙,罗彬彬,等.用于生物量浓度在线检测的光纤衰减全反射传感器［J］.光学精密工程, 2010,18(8): 1707-1714.

ZHAO M F, ZHONG N B, LUO B B, et al.. Optical fiber attenuated total reflection sensor for on-line measurement of biomass concentration ［J］. Opt. Precision Eng., 2010, 18(8): 1707-1714. (in Chinese)

[4] GONG Y, GUO Y, RAO Y J, et al.. Fiber-optic Fabry-Pérot sensor based on periodic focusing effect of graded-index multimode fibers ［J］. IEEE Photonics Technology Letters, 2010, 22(23): 1708-1710.

[5] QUERO G, CRESCITELLI A, PALADINO D, et al.. Evanescent wave long-period fiber grating within D-shaped optical fibers for high sensitivity refractive index detection ［J］. Sensors and Actuators B: Chemical, 2011,2(152): 196-205.

[6] 钟年丙,廖强,朱恂,等. 超声技术在石英光纤腐蚀中的运用［J］. 光学精密工程, 2012,20(5): 988-995.

ZHONG N B, LIAO Q, CHEN R, et al.. Application of ultrasonic technology to etching silica optical fiber ［J］. Opt. Precision Eng., 2012,20(5): 988-995.(in Chinese)

[7] CORRES J M, MATIAS I R, BRAVO J, et al.. Tapered optical fiber biosensor for the detection of anti-gliadin antibodies ［J］. Sensors and Actuators B: Chemical, 2008,1(135): 166-171.

[8] MACHAVARAM V R, BADCOCK R A, FERNANDO G F. Fabrication of intrinsic fibre Fabry-Perot sensors in silica fibres using hydrofluoric acid etching ［J］. Sens. Actuators A, 2007, 138: 248-260.

[9] LU P, MEN L Q, CHEN Q Y. Polymer-coated fiber Bragg grating sensors for simultaneous monitoring of soluble analytes and temperature ［J］. Sensors Journal, IEEE, 2009, 4(9): 340-345.

[10] GEHRIG S M, KOOPMAN R, NAIM T, et al.. Making fast-twitch dystrophic muscles bigger protects them from contraction injury and attenuates the dystrophic pathology ［J］. The American Journal of Pathology, 2010,176(1): 29-33.

[11] ZHONG N B, LIAO Q, WANG Y Z, et al.. High-quality fiber fabrication in buffered HF solution with ultrasonic agitation ［J］. Applied Optics, 2013,6(52): 1432-1440.

[12] SCHWARTZ B, ROBBINS H. Chemical etching of silicon 4. etching technology ［J］. Journal of the Electrochemical Society, 1976, 12(123): 1903-1909.

[13] BARANSKI M, ALBERO J, GORECKI C. A numerical model of wet isotropic etching of silicon molds for microlenses fabrication ［J］. Journal of the Electrochemical Society, 2011, 11(158): D681-D688.

[14] SCHIMMEL D G. Comparison of chemical etches for revealing (100) silicon crystal defects ［J］. Journal of the Electrochemical Society, 1976, 5(123): 734-741.

[15] JOHN J P, CDONALD J. Spray etching of silicon in the HNO3/HF/H2O system ［J］. Journal of the Electrochemical Society, 1993, 9(140): 2622-2625.

[16] LIPPOLD M, PATZIG-KLEIN S, KROKE E. HF-HNO(3)-H(2)SO(4)/H(2)O mixtures for etching multicrystalline silicon surfaces: formation of NO(2)(+), reaction rates and surface morphologies ［J］. Zeitschrift Fur Naturforschung Section B-A Journal of Chemical Sciences, 2011, 2(66): 155-163.

[17] MACKAY R E, LIONIS N, LE H R. 3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS ［J］. Microsyst Technol., 2011, (17): 1763-1770.

[18] MILIND S K, HENRY F E. Acid-based etching of silicon wafers: mass-transfer and kinetic effects ［J］. Journal of the Electrochemical Society, 2000, 1(147): 176-188.

[19] LEE M T. Reaction of high-silica optical fibers with hydrofluoric acid ［J］. J. Am. Cer. Soc., 1984,67: C21-C22.

[20] 李磊,肖泽仪,张志炳,等.硅橡胶复合膜用于渗透蒸发的膜传质动力学(I)膜面上的对流传质［J］. 化工学报, 2002,11(53): 1169-1174.

LI L, XIAO Z Y, ZHANG ZH B, et al.. Mass transfer kinetics of pervaporation by using composite silicone rubber membrane (I): convective transport on membrane surface ［J］. Journal of Chemical Industry and Engineering (China), 2002,11(53): 1169-1174.(in Chinese)

[21] OSSEO-ASARE K. Surface chemical processes in chemical mechanical polishing ［J］. J. Electrochem. Soc., 2002,12(149): G651-G655.

钟年丙, 王永忠, 廖强, 朱恂, 陈蓉. 流动腐蚀方式对石英光纤湿腐蚀特性的影响[J]. 光学精密工程, 2013, 21(8): 1966. ZHONG Nian-bing, WANG Yong-zhong, LIAO Qiang, ZHU Xun, CHEN Rong. Effect of flow etching method on wet etching properties of silica optical fiber[J]. Optics and Precision Engineering, 2013, 21(8): 1966.

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