超导水平磁场结构对300 mm直拉硅单晶固液界面影响的三维数值模拟

张晶; 杜燕军; 刘丁; 任俊超

人工晶体学报, 2020, 49 (4): 600, 网络出版: 2020-06-15

超导水平磁场结构对300 mm直拉硅单晶固液界面影响的三维数值模拟

Three-Dimensional Numerical Simulation on the Effect of Superconducting Horizon Magnetic Field Structures on Solid-Liquid Interface of 300 mm Czochralski Monocrystalline Silicon

论文大纲

张晶杜燕军刘丁 ^*任俊超

作者单位

西安理工大学，晶体生长设备及系统集成国家地方联合工程中心，陕西省复杂系统控制与智能信息处理重点实验室，西安 710048

超导水平磁场结构直拉硅单晶固液界面数值模拟 superconducting transverse magnetic field structur Czochralski monocrystalline silicon solid-liquid interface numerical simulation

摘要

针对不同超导水平磁场结构的磁力线分布对300 mm直拉硅单晶固液界面影响问题，本文采用一种基于格子Boltzmann方法的耦合热格子模型，解决温度场与速度场耦合建模问题，并对不同结构的超导磁场作用下的晶体生长进行了三维数值模拟。结果表明，采用单磁力线分布的超导磁场结构使得固液界面氧含量降低，但是容易引起熔体内部热分布不均匀；采用双磁力线分布结构能够有效地改善熔体内部沿晶体生长的轴向温度梯度和沿固液界面的径向温度梯度，然而，其对固液界面氧含量抑制作用较小。当晶转、埚转工艺作用时，超导单磁力线水平磁场结构明显优于超导双磁力线水平磁场结构，固液界面形状对称性随磁感应强度的增加而增强。

Abstract

Aiming at the influence of the magnetic field line distribution of different superconducting transverse magnetic field structures on the solid-liquid interface of 300 mm Czochralski monocrystalline silicon, a coupling thermal lattice model based on the lattice Boltzmann method was adopted to solve the problem of coupling modeling of temperature and velocity fields. And three-dimensional numerical simulation of crystal growth under the superconducting magnetic field of the different structures was conducted. The result indicate that the oxygen content at solid-liquid interface is successfully lowered through the adoption of superconducting magnetic field with single magnetic line distribution; however, the heat distribution inside the melt is likely to be uneven. Adopting double magnetic line distribution may effectively perfect the axial temperature gradient that grows along the crystal and the radial temperature gradient that grows along the solid-liquid interface inside the melt. However, it has less restraining effect on the oxygen content at solid-liquid interface. When the crystal rotation and the crucible rotating were applied, the superconducting single magnetic line magnetic field structure is much better than superconducting double magnetic line magnetic field structure; besides, as the magnetic induction increases, the shape symmetry of the solid-liquid interface increases.

参考文献

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张晶, 杜燕军, 刘丁, 任俊超. 超导水平磁场结构对300 mm直拉硅单晶固液界面影响的三维数值模拟[J]. 人工晶体学报, 2020, 49(4): 600. ZHANG Jing, DU Yanjun, LIU Ding, REN Junchao. Three-Dimensional Numerical Simulation on the Effect of Superconducting Horizon Magnetic Field Structures on Solid-Liquid Interface of 300 mm Czochralski Monocrystalline Silicon[J]. Journal of Synthetic Crystals, 2020, 49(4): 600.

超导水平磁场结构对300 mm直拉硅单晶固液界面影响的三维数值模拟

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