光子学报, 2019, 48 (8): 0812003, 网络出版: 2019-11-28  

马赫曾德双成像的镜面材料内部缺陷检测系统

Internal Defect Detection of Material with Specular Using Double Imaging Mach-Zehnder System
作者单位
合肥工业大学 仪器科学与光电工程学院, 合肥 230009
摘要
针对传统剪切散斑干涉技术只能测量粗糙表面, 无法直接测量镜面物体的缺陷, 提出了一种改进的剪切成像装置, 利用被测物表面反射由激光经毛玻璃组扩束后产生的散斑来实现镜面物体缺陷检测; 同时采用双成像的马赫曾德干涉系统, 实现剪切量与载波频率的独立调整, 扩大有效测量区域.对8 k镜面板采用顶针加载的方式, 对预置缺陷的镜面表面材料采用热加载的方式, 进行缺陷检测.实验结果表明: 该方法检测出的缺陷分布与加载方式、预置缺陷的分布基本保持一致, 可实现对镜面材料内部缺陷的快速动态检测.
Abstract
Considering the situation that the traditional shearography requires that the surface of the measured object must be sufficiently rough, thus it is hard to measure specular objects directly, an improved shearography system was proposed. The speckle generated by the laser passing through the frosted glass was reflected by the specular of the measured object to achieve the measurement. And we adopted double imaging Mach-Zehnder digital shearography to adjust the shear and carrier frequency independently and to expand the effective measurement region. In the defect detection experiments, the 8 k mirror panel was loaded by the thimble and the manufactured mirror material was loaded by heat loading. The experimental results revels that the distribution of defects detected by proposed method is basically consistent with that of manufactured defects and loading methods.
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钟诗民, 孙方圆, 陈维杰, 吴双乐, 王永红. 马赫曾德双成像的镜面材料内部缺陷检测系统[J]. 光子学报, 2019, 48(8): 0812003. ZHONG Shi-min, SUN Fang-yuan, CHEN Wei-jie, WU Shuang-le, WANG Yong-hong. Internal Defect Detection of Material with Specular Using Double Imaging Mach-Zehnder System[J]. ACTA PHOTONICA SINICA, 2019, 48(8): 0812003.

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