硅光子阵列波导光栅(AWG)是实现硅基光子集成的重要器件。根据不同器件结构和材料介绍了该器件的研究进展。器件结构主要包括常规对称型、反射型、级联型和多模干涉仪(MMI)输入型。与常规对称型阵列波导光栅相比,反射型阵列波导光栅使器件尺寸更小;级联阵列波导光栅通道串扰性能更优越;MMI输入阵列波导光栅能获得平坦化输出光谱。硅材料具有高折射率,因此硅纳米线阵列波导光栅弯曲半径极小,器件更加紧凑;氮化硅阵列波导光栅具有良好的通道串扰和偏振性能。还介绍了温度和偏振不敏感阵列波导光栅,并对硅光子阵列波导光栅的未来发展趋势作出预测。
集成光学 阵列波导光栅 硅光子学 硅纳米线 氮化硅 激光与光电子学进展
2018, 55(12): 120009
Author Affiliations
Abstract
1 Department of Library, Kunming University of Science and Technology, Kunming 650500, China
2 College of Science, Kunming University of Science and Technology, Kunming 650500, China
In this Letter, we demonstrate a 1×4 low-crosstalk silicon photonics cascaded arrayed waveguide grating, which is fabricated on a silicon-on-insulator wafer with a 220-nm-thick top silicon layer and a 2 μm buried oxide layer. The measured on-chip transmission loss of this cascaded arrayed waveguide grating is ～4.0 dB, and the fiber-to-waveguide coupling loss is 1.8 dB/facet. The measured channel spacing is 6.4 nm. The adjacent crosstalk by characterization is very low, only 33.2 dB. Compared to the normal single silicon photonics arrayed waveguide grating with a crosstalk of ～ 12.5 dB, the crosstalk of more than 20 dB is dramatically improved in this cascaded device.
130.0130 Integrated optics 220.0220 Optical design and fabrication 230.1950 Diffraction gratings Chinese Optics Letters
2017, 15(4): 041301
