For special requests of eliminatng noise in wrapped phase field, a vector filtering method of wrapped phase field pretreatment is proposed. Power spectral density and the filtering behavior of vector transformation are analyzed theoretically. Through simulation, the size of the filter template affecting on filtering imaging is investigated, the filtering effects of second mean filtering method and vector filtering method at the same size of filter template is comparised, the curve distribution of power spectral density of second mean filtering method and vector filtering method is analyzed. It shows the phase image filtered by vector filtering method which can decrease noise is still clean, the distribution of power spectral density has no change, the spectral information loss after pretreatment though vector filtering was smaller than second mean filtering. The vector filtering method improves signal-to-noise ratio, furthermore the information integrity still obtains a better guarantee at the same time.

针对包裹相位场在消除噪声的特别要求,提出了对包裹相位场预处理的向量滤波方法。理论分析了功率谱密度和向量变换的滤波思想。仿真实验研究了滤波模板的大小对滤波效果的影响,比较了在同样模板的选取下向量滤波方法与二次均值滤波法的滤波效果,分析了向量滤波方法与二次均值滤波法的功率谱密度分布。结果表明,相比二次均值滤波法,向量滤波法在降噪的同时,相位图依然清晰,它的功率谱密度分布没有明显变化,预处理后频谱信息的丢失远小于二次均值滤波。向量滤波法在提高信噪比的同时,信息的完整性得到较好保证。

在干涉检验过程中, 被检元件的面形误差检测精度受到干涉仪系统结构的影响, 从而降低测量结果的可靠性。为了得到较高的检测精度, 必须对检测系统进行分析, 建立测量误差和系统结构的关联度。根据菲涅耳衍射近似理论, 就菲佐干涉仪中的准直镜和标准镜面形误差对透过检测的影响进行了研究。通过对波前相位传递情况的分析, 得出波前误差和系统结构参量的相关性, 去除空腔系统误差, 优化结构参量, 并建立准直镜误差容限表达式。经计算得出, 当被检面形变误差为0.2λ时, 测试误差可以达到0.02λ, 而对准直镜的面形误差要求只需0.8λ。