碘化铯膜层对紫外光以及X射线具有很高的光电转换效率，但在空气中容易发生潮解。介绍了微通道板碘化铯膜层抗潮解超薄保护膜层的制备与保护效果。使用扫描式电子显微镜（scanning electron microscope，SEM）对碘化铯薄膜光阴极微通道板的镀膜深度和厚度进行测试，采用氧化铝作为碘化铯薄膜光阴极的保护膜层，并分别制备了厚度为2 nm、5 nm和10 nm的氧化铝保护膜层。在空气中存放不同时间后，碘化铯薄膜光阴极微通道板表面未发生明显潮解变化，其增益约为8 800，暗计数率约为4.1 counts·s^?1·cm^?2。试验证明，氧化铝能够作为微通道板碘化铯膜层抗潮解超薄保护膜层。

微通道板作为一种关键的电子倍增器件，广泛应用于诸多领域。分析了NiCr膜层作为微通道板的输入端电极时，对微通道板开口面积比的影响，建立了理论模型，计算了膜层厚度、镀膜深度等参数对开口面积比的影响。开展了2种减小开口面积比损失的镀膜研究：一是进行工艺调整，减弱合金蒸发的分馏效应，降低电极膜层的电阻率，开口面积比损失量降低约2%；二是改变镀膜方式，使用Ni、Cr金属单质镀制叠层薄膜，在镀膜过程中调控镍、铬的比例，将输入端电极中镍比例升高，同样可以降低电极膜层的电阻率，在满足面电阻要求的前提下，可减薄输入端膜层至86 nm，与300 nm厚度的常规镍铬合金膜层相比，MCP输入端的开口面积比损失量降低3%~4%，MCP增益提升6%。

A planar-integrated optical system (PIOS) represents powerful optical imaging and information processing techniques and is a potential candidate for the realization of a three-dimensional (3D) integrated optoelectronic intelligent system. Coupling the optical wave carrying information into a planar transparent substrate (typically fused silica) is an essential prerequisite for the realization of such a PIOS. Unlike conventional grating couplers for nano-waveguides on the silicon-on-insulator platform, the grating couplers for PIOS enable to obtain a higher design freedom and to achieve much higher coupling efficiency. By combining the rigorous coupled wave algorithm and simulated annealing optimization algorithm, a high-efficiency asymmetric double-groove grating coupler is designed for PIOS. It is indicated that, under the condition of the normal incidence of TE polarization, the diffraction efficiency of the -1st order is over 95%, and its average value is 97.3% and 92.8% in the C and C+L bands. The simulation results indicate that this type of grating coupler has good tolerance and is expected to be applied in optical interconnections, waveguide-based augmented reality glasses, and planar-integrated 3D interconnection optical computing systems.